Atomic Layer Deposition of NiO by the Ni(thd)2/H2O Precursor Combination von Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan-Otto

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Phase stability and oxygen doping in the Cu–N–O system von Fallberg, Anna, Ottosson, Mikael, Carlsson, Jan-Otto

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Phase Formation Behavior in Ultrathin Iron Oxide von Jõgi, Indrek, Jacobsson, T. Jesper, Fondell, Mattis, Wätjen, Timo, Carlsson, Jan-Otto, Boman, Mats, Edvinsson, Tomas

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Doping of metastable Cu3N at different Ni concentrations: Growth, crystallographic sites and resistivity von Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan-Otto

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CVD of Copper(I) Nitride von Fallberg, Anna, Ottosson, Mikael, Carlsson, Jan-Otto

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Gas-Pulsed CVD for Film Growth in the CuNiN System von Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan-Otto

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Growth of copper metal by atomic layer deposition using copper(I) chloride, water and hydrogen as precursors von Törndahl, Tobias, Ottosson, Mikael, Carlsson, Jan-Otto

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Growth and stability of CVD Ni3N and ALD NiO dual layers von LINDAHL, Erik, OTTOSSON, Mikael, CARLSSON, Jan-Otto

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Atomic Layer Epitaxy of Copper on Tantalum von Mårtensson, Per, Carlsson, Jan-Otto

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Growth of Copper(I) Nitride by ALD Using Copper(II) Hexafluoroacetylacetonate, Water, and Ammonia as Precursors von Torndahl, Tobias, Ottosson, Mikael, Carlsson, Jan-Otto

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Atomic Layer Deposition of NiO by the Ni(thd) 2 /H 2 O Precursor Combination von Lindahl, Erik, Ottosson, Mikael, Carlsson, Jan‐Otto

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Atomic layer deposition of BN thin films von Mårlid, Björn, Ottosson, Mikael, Pettersson, Ulrika, Larsson, Karin, Carlsson, Jan-Otto

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Out-of-plane vibrations of quartz resonators used in quartz crystal microbalance measurements in gas phase von Mecea, Vasile Mihai, Carlsson, Jan-Otto, Alm, Oscar, Boman, Mats

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Epitaxy of copper on α-Al2O3(001) by atomic layer deposition von TÖRNDAHL, Tobias, JUN LU, OTTOSSON, Mikael, CARLSSON, Jan-Otto

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Crystallinity, morphology and microstructure of chemical-vapor-deposited carbon films on different substrates von Johansson, Ann-Sofie, Carlsson, Jan-Otto

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Chemical vapour deposition of Cu2O and CuO from CuI and O2 or N2O von OTTOSSON, M, CARLSSON, J.-O

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Atomic Layer Epitaxy of Copper: Growth and Selectivity in the Cu(II)‐2,2,6,6‐tetramethyl‐3,5‐heptanedionate/ Process von Maårtensson, Per, Carlsson, Jan‐Otto

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Atomic layer epitaxy of copper: an ab initio investigation of the CuCl/H 2 process : I. Adsorption of CuCl on Cu(111) von Mårtensson, Per, Larsson, Karin, Carlsson, Jan-Otto

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Chemical vapour deposition of TiO and Ti2O3 from TiCl4/H2/CO2 gas mixtures von FREDRIKSSON, E, CARLSSON, J.-O

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TEM investigation of CVD graphite on nickel von Johansson, Ann-Sofie, Lu, Jun, Carlsson, Jan-Otto

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