Some Resists Based On Chemically-Amplified Crosslinking Of Phenolic Polymers von Bohland, John F., Calabrese, Gary S., Cronin, Michael F., Canistro, Diane, Fedynyshyn, Theodore H., Ferrari, Joseph, Lamola, A. A., Orsula, George W., Pavelchek, Edward K., Sinta, Roger, Thackeray, James W., Berry, Amanda K., Pogan, Leonard E., Jr, Grandpre, Mark P. de, Feely, Wayne E., Graziano, Karen A., Olsen, Robert, Thompson, Steven, Winkle, Mark R.

Volltext