Structural and electrical properties of Nb-doped TiO2 films sputtered with plasma emission control von Mukherjee, S.K., Becker, H.W., Cadiz Bedini, A.P., Nebatti, A., Notthoff, C., Rogalla, D., Schipporeit, S., Soleimani-Esfahani, A., Mergel, D.

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Structural and electrical properties of Nb-doped TiO 2 films sputtered with plasma emission control von Mukherjee, S.K., Becker, H.W., Cadiz Bedini, A.P., Nebatti, A., Notthoff, C., Rogalla, D., Schipporeit, S., Soleimani-Esfahani, A., Mergel, D.

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Liquid hydridosilane precursor prepared from cyclopentasilane via sonication at low temperatures without the action of light von Cádiz Bedini, A.P., Muthmann, S., Allgaier, J., Bittkau, K., Finger, F., Carius, R.

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