Method of improving uniformity of etching of a film on an article von SRIVASTAVA KAMALESH K, FANTI LISA A, GRIFFITH JONATHAN H, CULLINAN-SCHOLL MARY C, KNARR RANDOLPH F

Volltext bestellen

Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization von SRIVASTAVA KAMALESH K, GRIFFITH JONATHAN H, CULLINAN-SCHOLL MARY C, BREARLEY WILLIAM H, WADE PETER C

Volltext bestellen

SEMICONDUCTORS AND METHODS OF MAKING von QUON ROGER A, SRIVASTAVA KAMALESH K, ZUPANSKI-NIELSEN DONNA S, MELVILLE IAN D, DAUBENSPECK TIMOTHY H, MUZZY CHRISTOPHER D, LANDERS WILLIAM F, CULLINAN-SCHOLL MARY C, CLEVENGER LAWRENCE A

Volltext bestellen

Chip Package Interaction for 65nm CMOS Technology with C4 Interconnections von Farooq, M., Melville, I., Muzzy, C., McLaughlin, P.V., Hannon, R., Sauter, W., Muncy, J., Questad, D., Carey, C., Cullinan-Scholl, M., McGahay, V., Angyal, M., Nye, H., Lane, M., Xiao Hu Liu, Shaw, T., Murray, C.

Volltext