STANDARDLESS HIGHLY COHERENT INTERFEROMETER von Ulasevich Boris Aleksandrovich, Toropov Mikhail Nikolaevich, Salashchenko Nikolaj Nikolaevich, Malyshev Ilya Vyacheslavovich, Akhsakhalyan Anton Aramovich, Chkhalo Nikolaj Ivanovich

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INTERFEROMETER von Ulasevich Boris Aleksandrovich, Toropov Mikhail Nikolaevich, Gavrilin Dmitrij Aleksandrovich, Salashchenko Nikolaj Nikolaevich, Malyshev Ilya Vyacheslavovich, Akhsakhalyan Anton Aramovich, Chkhalo Nikolaj Ivanovich

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LOW-COHERENCE INTERFEROMETER WITH DIFFRACTION REFERENCE WAVE AND SOURCE OF TWO SPHERICAL REFERENCE WAVES THEREFOR von CHKHALO NIKOLAJ IVANOVICH, SALASHCHENKO NIKOLAJ NIKOLAEVICH, TOROPOV MIKHAIL NIKOLAEVICH, VOLGUNOV DMITRIJ GENNAD'EVICH

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DEVICE FOR INSPECTING SURFACE ROUGHNESS von SALASHCHENKO NIKOLAJ NIKOLAEVICH, CHKHALO NIKOLAJ IVANOVICH, PESTOV ALEKSEJ EVGEN'EVICH, BARYSHEVA MARIJA MIKHAJLOVNA

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DEVICE FOR RECEIVING DIRECTIONAL EXTREME ULTRAVIOLET RADIATION WITH WAVELENGTH OF 11,2 nm ±1% FOR HIGH-RESOLUTION PROJECTIVE LITHOGRAPHY von Sidorov Aleksandr Vasilevich, Salashchenko Nikolaj Nikolaevich, Glyavin Mikhail Yurevich, Razin Sergej Vladimirovich, Izotov Ivan Vladimirovich, Litvak Aleksandr Grigorevich, Nechaj Andrej Nikolaevich, Vodopyanov Aleksandr Valentinovich, Mansfeld Dmitrij Anatolevich, Golubev Sergej Vladimirovich, Chkhalo Nikolaj Ivanovich, Skalyga Vadim Aleksandrovich, Luchinin Aleksej Grigorevich

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METHOD OF GENERATING DIRECTED EXTREME ULTRAVIOLET (EUV) RADIATION FOR HIGH-RESOLUTION PROJECTION LITHOGRAPHY AND DIRECTED EUV SOURCE FOR REALISING SAID METHOD von SALASHCHENKO NIKOLAJ NIKOLAEVICH, CHKHALO NIKOLAJ IVANOVICH, LITVAK ALEKSANDR GRIGOR'EVICH, VODOP'JANOV ALEKSANDR VALENTINOVICH, GOLUBEV SERGEJ VLADIMIROVICH, OKS EFIM MIKHAJLOVICH, MANSFEL'D DMITRIJ ANATOL'EVICH, JUSHKOV GEORGIJ JUR'EVICH

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