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    Semiconductor device having optimized shallow junction geometries and method for fabrication thereof

    Semiconductor device having optimized shallow junction geometries and method for fabrication thereof von Hornung, Brian E, Zhang, Xin, Robertson, Lance S, Chakravarthi, Srinivasan, Chidambaram, Beriannan

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    Semiconductor device having optimized shallow junction geometries and method for fabrication thereof

    Semiconductor device having optimized shallow junction geometries and method for fabrication thereof von HORNUNG BRIAN E, CHIDAMBARAM BERIANNAN, CHAKRAVARTHI SRINIVASAN, ROBERTSON LANCE S, ZHANG XIN

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