Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology von Cheong, Lin Lee, Paul, Philip, Holzner, Felix, Despont, Michel, Coady, Daniel J, Hedrick, James L, Allen, Robert, Knoll, Armin W, Duerig, Urs

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Reduction of Critical Dimension Difference in Litho-Etch-Litho- Etch Double Patterning Process von Tang, Hao, Shearer, Jeffrey C., Cheong, Lin Lee, Saulnier, Nicole A., Sieg, Stuart A., Petrillo, Karen, Metz, Andrew, Arnold, John C.

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Neon Ion Beam Lithography (NIBL) von Winston, Donald, Manfrinato, Vitor R, Nicaise, Samuel M, Cheong, Lin Lee, Duan, Huigao, Ferranti, David, Marshman, Jeff, McVey, Shawn, Stern, Lewis, Notte, John, Berggren, Karl K

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Three-dimensional photonic crystals by large-area membrane stacking von Lu, Ling, Cheong, Lin Lee, Smith, Henry I, Johnson, Steven G, Joannopoulos, John D, Soljačić, Marin

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Sub-5 keV electron-beam lithography in hydrogen silsesquioxane resist von Manfrinato, Vitor R., Cheong, Lin Lee, Duan, Huigao, Winston, Donald, Smith, Henry I., Berggren, Karl K.

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3D nanostructures by stacking pre-patterned fluid-supported single-crystal Si membranes von Ghadarghadr, Shabnam, Fucetola, Corey P., Lee Cheong, Lin, E. Moon, Euclid, I. Smith, Henry

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Secondary-electron signal level measurements of self-assembled monolayers for spatial-phase-locked electron-beam lithography von Lee Cheong, Lin, Lobez, Jose M., Moon, Euclid E., Hastings, Jeffrey T., Smith, Henry I.

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Benchmarking framework for anomaly localization: Towards real-world deployment of automated visual inspection von Gangopadhyay, Tryambak, Hong, Sungmin, Roy, Sujoy, Shah, Yash, Cheong, Lin Lee

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Three-dimensional photonic crystals by large-area membrane stacking von Lu, Ling, Cheong, Lin Lee, Smith, Henry I., Johnson, Steven G., Joannopoulos, John D., Soljačić, Marin

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Sub-5keV electron-beam lithography in hydrogen silsesquioxane resist von Manfrinato, Vitor R., Cheong, Lin Lee, Duan, Huigao, Winston, Donald, Smith, Henry I., Berggren, Karl K.

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Neon Ion Beam Lithography (NIBL) von Winston, Donald, Manfrinato, Vitor R., Nicaise, Samuel M., Cheong, Lin Lee, Duan, Huigao, Ferranti, David, Marshman, Jeff, McVey, Shawn, Stern, Lewis, Notte, John, Berggren, Karl K.

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Explainability of Traditional and Deep Learning Models on Longitudinal Healthcare Records von Cheong, Lin Lee, Meharizghi, Tesfagabir, Black, Wynona, Guang, Yang, Meng, Weilin

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Design of three-dimensional photonic crystals for large-area membrane stacking von Ling Lu, Lin Lee Cheong, Smith, H. I., Johnson, S. G., Joannopoulos, J., Soljacic, M.

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Rational decision-making tool for semiconductor processes von Cirlig, Bogdan, Kuravi, Lakshmikar, Honda, Tomonori, Cheong, Lin Lee

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Single View Physical Distance Estimation using Human Pose von Fei, Xiaohan, Wang, Henry, Zeng, Xiangyu, Cheong, Lin Lee, Wang, Meng, Tighe, Joseph

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Failure detection and classsification using sensor data and/or measurement data von Kuravi, Lakshmikar, Honda, Tomonori, Cheong, Lin Lee

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Converting natural language queries to SQL queries using ontological codes and placeholders von Romero Calvo, Miguel, Sarraf, Saman, Meharizghi, Tesfagabir, Senthivel, Thiruvarul Selvan, Cheong, Lin Lee

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Rational Decision-Making Tool for Semiconductor Processes von Cirlin, Bogdan, Kuravi, Lakshmikar, Honda, Tomonori, Cheong, Lin Lee

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Maintenance scheduling for semiconductor manufacturing equipment von Honda, Tomonori, David, Jeffrey Drue, Cheong, Lin Lee

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Wafer Bin Map Based Root Cause Analysis von Keleher, Michael, Honda, Tomonori, Burch, Richard, David, Jeffrey Drue, Cheong, Lin Lee, Zhu, Qing

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