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  1. 1
    Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices

    Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices von Chen, Fei-Yun, Kuan, Ni-Hwi, Chang, Yuh-Hwa, Lee, Yuan-Pang, Hwang, Yuan-Ko, Chen, Shuh-Shun

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  2. 2
    Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices

    Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices von CHEN FEI-YUN, HWANG YUAN-KO, CHEN SHUH-SHUN, LEE YUAN-PANG, KUAN NI-HWI, CHANG YUH-HWA

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  3. 3
    Method to avoid alpha-Si damage during wet stripping processes in the manufacture of MEMS devices

    Method to avoid alpha-Si damage during wet stripping processes in the manufacture of MEMS devices von CHEN FEI-YUN, HWANG YUAN-KO, CHEN SHUH-SHUN, LEE YUAN-PANG, KUAN NI-HWI, CHANG YUH-HWA

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