MEMS-based hydrogen gas sensors von DiMeo, Frank, Chen, Ing-Shin, Chen, Philip, Neuner, Jeffrey, Roerhl, Andreas, Welch, James

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SACVD clean investigation with a new calorimetric probe sensor von Kunstmann, T., Paulus, S., Ing-Shin Chen, Auer, H., Lin Feng, Chism, R., Roeder, J.F.

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Internal photoemission on a-Si:H Schottky barrier structures revisited von Chen, Ing-Shin, Wronski, C.R.

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Characterization of semiconductor heterojunctions using internal photoemission von Chen, Ing-Shin, Jackson, T. N., Wronski, C. R.

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METALORGANIC CHEMICAL VAPOR DEPOSITION OF THIN FILM ZrO2 AND Pb(Zr,Ti)O3: PRECURSOR CHEMISTRY AND PROCESS CHARACTERISTICS von Chen, I-S, Hendrix, B C, Bilodeau, S M, Wang, Z, Xu, C, Johnston, S, Van Buskirk, P C

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End-pointing chamber clean by calorimetric probing of process effluent von Chen, Ing-Shin, Neuner, Jeffrey W., Welch, James J., Chen, Philip S. H., DiMeo, Frank

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Application of a downstream calorimetric probe to reactive plasma von Chen, Ing-Shin, Neuner, Jeffery W., Chen, Philip S. H., Welch, James J., DiMeo, Frank

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Micromachined chemical sensor with dual-transduction mechanisms von Chen, Ing-Shin, Stawasz, Michele, DiMascio, Susan K., Welch, James J., Neuner, Jeffrey W., Chen, Philip S. H., DiMeo, Frank

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A novel approach to the analysis of sub-bandgap absorption in a-Si:H based materials von Chen, Ing-Shin, Jiao, Lihong, Collins, Robert W., Wronski, Christopher R.

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Metalorganic chemical vapor deposition Pb(Zr,Ti)O3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems von Chen, Ing-Shin, Roeder, Jeffrey F., Kim, Dong-Joo, Maria, Jon-Paul, Kingon, Angus I.

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Mobility and optical gaps in different a-Si:H based materials and their impact on cell performance von Ing-Shin Chen, Taraneh Jamali-Beh, Yeeheng Lee, Ching-Yi Li, Wronski, C.R.

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Real time characterization of the preparation of amorphous silicon-based solar cells von Yiwei Lu, Sangbo Kim, Ing-Shin Chen, Yeeheng Lee, Fortmann, C.M., Wronski, C.R., Collins, R.W.

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Fluid monitoring apparatus von Baum, Thomas H, Chen, Ing-Shin Barry, Chism, Richard D

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Internal photoemission on a-Si:H Schottky barrier structures revisited: Electronic processes in hydrogenated amorphous silicon von ING-SHIN CHEN, WRONSKI, C. R

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Metalorganic Chemical Vapor Deposition of Thin Film ZrO 2 and Pb(Zr,Ti)O 3 : Precursor Chemistry and Process Characteristics von Chen, Ing-Shin, Hendrix, Bryan C., Bilodeau, Steven M., Wang, Ziyun, Xu, Chongying, Johnston, Stephen, Van Buskirk, Peter C., Baum, Thomas H., Roeder, Jeffrey F.

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FLUID MONITORING APPARATUS von CHISM RICHARD D, CHEN ING-SHIN BARRY, BAUM THOMAS H

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Fluid monitoring apparatus von CHISM RICHARD D, CHEN ING-SHIN BARRY, BAUM THOMAS H

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Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same von DIMEO FRANK,CHEN PHILIP S. H.,CHEN ING-SHIN,NEUNER JEFFREY W.,WELCH JAMES

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FLUID MONITORING APPARATUS von CHISM RICHARD D, CHEN ING-SHIN BARRY, BAUM THOMAS H

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FLUID MONITORING APPARATUS von CHEN, ING-SHIN, BARRY, BAUM, THOMAS, H, CHISM, RICHARD, D

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