The role of gas-phase in the laser etching of Cu by CCl 4 von De´barre, D., Aliouchouche, A., Boulmer, J., Bourguignon, B., Budin, J.P.

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The role of gas-phase in the laser etching of Cu by CCl4 von De´barre, D., Aliouchouche, A., Boulmer, J., Bourguignon, B., Budin, J.P.

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Time of flight study of low pressure laser etching of silicon by chlorine von Boulmer, J., Bourguignon, B., Budin, J.P., Debarre, D.

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Laser-assisted processes in the microelectronic industry von Budin, J.P., Boulmer, J., De´barre, D.

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Croissance cristalline des pentaphosphates de terres rares, NdP 5O 14ET Nd xLa 1- xP 5O 14 von Marais, M., Chinh, Nguyen Duc, Savary, H., Budin, J.P.

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Croissance cristalline des pentaphosphates de terres rares, NdP5O14ET NdxLa1-xP5O14 von Marais, M., Chinh, Nguyen Duc, Savary, H., Budin, J.P.

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