Investigation of Thermal Expansion Effects on Si-Based MEMS Structures von Brookshire, Kirsten L., Rafiei, Ramin, Martyniuk, Mariusz, Silva, K. K. M. B. D., Faraone, Lorenzo, Yinong Liu

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Microelectromechanical systems (MEMS) and methods von Faraone, Lorenzo, Brookshire, Kirsten, Tripathi, Dhirendra, Silva, Dilusha, Dell, John Marcel, Liu, Yinong, Antoszewski, Jarek, Martyniuk, Mariusz, Bumgarner, John, Haifeng, Mao

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MICROELECTROMECHANICAL SYSTEMS (MEMS) AND METHODS von BROOKSHIRE, Kirsten, TRIPATHI, Dhirendra, BUMGARNER, John, SILVA, Dilusha, ANTOSZEWSKI, Jarek, HAIFENG, Mao, LIU, Yinong, MARTYNIUK, Mariusz, DELL, John Marcel, FARAONE, Lorenzo

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Microelectromechanical systems (MEMS) and methods von BROOKSHIRE, Kirsten, TRIPATHI, Dhirendra, BUMGARNER, John, SILVA, Dilusha, ANTOSZEWSKI, Jarek, HAIFENG, Mao, LIU, Yinong, MARTYNIUK, Mariusz, DELL, John Marcel, FARAONE, Lorenzo

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MICROELECTROMECHANICAL SYSTEMS (MEMS) AND METHODS von BROOKSHIRE, Kirsten, TRIPATHI, Dhirendra, BUMGARNER, John, SILVA, Dilusha, ANTOSZEWSKI, Jarek, HAIFENG, Mao, LIU, Yinong, MARTYNIUK, Mariusz, DELL, John Marcel, FARAONE, Lorenzo

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Microelectromechanical systems (MEMS) and methods von Faraone, Lorenzo, Brookshire, Kirsten, Tripathi, Dhirendra, Silva, Dilusha, Dell, John Marcel, Liu, Yinong, Antoszewski, Jarek, Martyniuk, Mariusz, Bumgarner, John, Haifeng, Mao

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MICROELECTROMECHANICAL SYSTEMS (MEMS) AND METHODS von BROOKSHIRE, Kirsten, TRIPATHI, Dhirendra, BUMGARNER, John, SILVA, Dilusha, ANTOSZEWSKI, Jarek, HAIFENG, Mao, LIU, Yinong, MARTYNIUK, Mariusz, DELL, John Marcel, FARAONE, Lorenzo

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