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  1. 1
    Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning

    Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning von Vos, Rita, Arnauts, Sophia, Bovie, Inge, Onsia, Bart, Garaud, Sylvain, Xu, Kaidong, Hongyu, Yu, Kubicek, Stefan, Rohr, Erika, Schram, Tom, Veloso, Anabela, Conard, Thierry, Leunissen, Leonardus H.A., Mertens, P.


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    Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning

    Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning von Vos, Rita, Arnauts, Sophia, Bovie, Inge, Onsia, Bart, Garaud, Sylvain, Xu, Kaidong, Hongyu, Yu, Kubicek, Stefan, Rohr, Erika, Schram, Tom, Veloso, Anabela, Leunissen, Leonardus H.A., Mertens, P.


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