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    Evaluation of sheet resistance and electrical linewidth measurement techniques for copper damascene interconnect

    Evaluation of sheet resistance and electrical linewidth measurement techniques for copper damascene interconnect von Smith, S., Walton, A.J., Ross, A.W.S., Bodammer, G.K.H., Stevenson, J.T.M.


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  2. 2
    Evaluation of the issues involved with test structures for the measurement of sheet resistance and linewidth of copper damascene interconnect

    Evaluation of the issues involved with test structures for the measurement of sheet resistance and linewidth of copper damascene interconnect von Smith, S., Walton, A.J., Ross, A.W.S., Bodammer, G.K.H., Stevenson, J.T.M.

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