Simple models for piston-type micromirror behavior von Miller, M H, Perrault, J A, Parker, G G, Bettig, B P, Bifano, T G

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Management of R&D projects under uncertainty: a multidimensional approach to managerial flexibility von Santiago, L.P., Bifano, T.G.

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Microelectromechanical deformable mirrors von Bifano, T.G., Perreault, J., Krishnamoorthy Mali, R., Horenstein, M.N.

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Elimination of stress-induced curvature in thin-film structures von Bifano, T.G., Johnson, H.T., Bierden, P., Mali, R.K.

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A hydromechanical biomimetic cochlea : Experiments and models von CHEN, Fangyi, COHEN, Howard I, BIFANO, Thomas G, CASTLE, Jason, FORTIN, Jeffrey, KAPUSTA, Christopher, MOUNTAIN, David C, ZOSULS, Aleks, HUBBARD, Allyn E

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Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror von Lu, Y., Ramsay, E., Stockbridge, C.R., Yurt, A., Köklü, F.H., Bifano, T.G., Ünlü, M.S., Goldberg, B.B.

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Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits von Goldberg, B.B., Yurt, A., Lu, Y., Ramsay, E., Köklü, F.H., Mertz, J., Bifano, T.G., Ünlü, M.S.

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Fixed-abrasive grinding of brittle hard-disk substrates von Bifano, Thomas G., Bierden, Paul A.

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Microscale Adaptive Optics: Wave-Front Control with a mu-Mirror Array and a VLSI Stochastic Gradient Descent Controller von Weyrauch, T, Vorontsov, M A, Bifano, T G, Hammer, J A, Cohen, M, Cauwenberghs, G

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Ion-beam machining of millimeter scale optics von Shanbhag, P M, Feinberg, M R, Sandri, G, Horenstein, M N, Bifano, T G

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CMOS chip planarization by chemical mechanical polishing for a vertically stacked metal MEMS integration von Lee, Hocheol, Miller, Michele H, Bifano, Thomas G

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Differential capacitive position sensor for planar MEMS structures with vertical motion von Horenstein, Mark N., Perreault, Julie A., Bifano, Thomas G.

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Contouring algorithm for ion figuring von Drueding, Thomas W., Bifano, Thomas G., Fawcett, Steven C.

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Acoustic emission as an indicator of material-removal regime in glass micro-machining von Bifano, T.G., Yi, Y.

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Precision manufacture of optical disc master stampers von Bifano, Thomas G., Fawcett, Helen E., Bierden, Paul A.

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Chemomechanical effects in ductile-regime machining of glass von Bifano, Thomas G., DePiero, Douglas K., Golini, Donald

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Electrostatic micromirrors for subaperturing in an adaptive optics system von Horenstein, Mark N., Pappas, Seth, Fishov, Asaf, Bifano, Thomas G.

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Specific grinding energy as an in-process control variable for ductile-regime grinding von Bifano, Thomas G., Fawcett, Steven C.

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Electrostatic effects in micromachined actuators for adaptive optics von Horenstein, Mark N., Bifano, Thomas G., Mali, Raji Krishnamoorthy, Vandelli, Nelsimar

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Specific grinding energy ans an in-process control variable for ductile-regime grinding von BIFANO, T. G, FAWCETT, S. C

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