Fluidized-bed atomic layer deposition reactor for the synthesis of core-shell nanoparticles von Didden, Arjen P., Middelkoop, Joost, Besling, Wim F. A., Nanu, Diana E., van de Krol, Roel

Volltext

Copper alloy seed integration for reliability improvement von Besling, Wim F.A., Federspiel, X., Vanypre, T., Torres, Joaquin

Volltext

Continuity and morphology of TaN barriers deposited by Atomic Layer Deposition and comparison with physical vapor deposition von Besling, Wim F.A., Ignacimouttou, Marie-Laurence, Humbert, Aurelie, Mellier, Maxime, Torres, Joaquin

Volltext

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy von Puurunen, Riikka L., Vandervorst, Wilfried, Besling, Wim F. A., Richard, Olivier, Bender, Hugo, Conard, Thierry, Zhao, Chao, Delabie, Annelies, Caymax, Matty, De Gendt, Stefan, Heyns, Marc, Viitanen, Minna M., de Ridder, Marco, Brongersma, Hidde H., Tamminga, Yde, Dao, Thuy, de Win, Toon, Verheijen, Marcel, Kaiser, Monja, Tuominen, Marko

Volltext

RF Characterization and Analytical Modelling of Through Silicon Vias and Coplanar Waveguides for 3D Integration von Lamy, Y P R, Jinesh, K B, Roozeboom, F, Gravesteijn, D J, Besling, W F A

Volltext

Diffusion Barrier Deposition on a Copper Surface by Atomic Layer Deposition von Elers, K.-E., Saanila, V., Soininen, P. J., Li, W.-M., Kostamo, J. T., Haukka, S., Juhanoja, J., Besling, W. F. A.

Volltext

METHOD OF FORMING A SELF ALIGNED COPPER CAPPING LAYER von VANYPRE, THOMAS, BESLING, WIM, F., A

Volltext bestellen

METHOD OF FORMING A SELF ALIGNED COPPER CAPPING LAYER von VANYPRE THOMAS, BESLING WIM F. A

Volltext bestellen

METHOD OF FORMING A SELF ALIGNED COPPER CAPPING LAYER von VANYPRE, THOMAS, BESLING, WIM, F., A

Volltext bestellen

METHOD OF FORMING A SELF ALIGNED COPPER CAPPING LAYER von VANYPRE, THOMAS, BESLING, WIM, F., A

Volltext bestellen