Single and multilayer metamaterials fabricated by nanoimprint lithography von Bergmair, I, Dastmalchi, B, Bergmair, M, Saeed, A, Hilber, W, Hesser, G, Helgert, C, Pshenay-Severin, E, Pertsch, T, Kley, E B, Hübner, U, Shen, N H, Penciu, R, Kafesaki, M, Soukoulis, C M, Hingerl, K, Muehlberger, M, Schoeftner, R

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Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration von Kirchner, R., Guzenko, V.A., Rohn, M., Sonntag, E., Mühlberger, M., Bergmair, I., Schift, H.

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UV-NIL fabricated bio-inspired inlays for injection molding to influence the friction behavior of ceramic surfaces von Mühlberger, M., Rohn, M., Danzberger, J., Sonntag, E., Rank, A., Schumm, L., Kirchner, R., Forsich, C., Gorb, S., Einwögerer, B., Trappl, E., Heim, D., Schift, H., Bergmair, I.

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UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays von Lausecker, E., Brehm, M., Grydlik, M., Hackl, F., Bergmair, I., Mühlberger, M., Fromherz, T., Schäffler, F., Bauer, G.

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Single and multilayer metamaterials fabricated by nanoimprint lithography von Bergmair, I, Dastmalchi, B, Bergmair, M, Saeed, A, Hilber, W, Hesser, G, Helgert, C, Pshenay-Severin, E, Pertsch, T, Kley, E B, Hübner, U, Shen, N H, Penciu, R, Kafesaki, M, Soukoulis, C M, Hingerl, K, Muehlberger, M, Schoeftner, R

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Anisotropic remastering for reducing feature sizes on UV nanoimprint lithography replica molds von Lausecker, E, Grydlik, M, Brehm, M, Bergmair, I, Mühlberger, M, Fromherz, T, Bauer, G

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UV-NIL with working stamps made from Ormostamp von Mühlberger, M., Bergmair, I., Klukowska, A., Kolander, A., Leichtfried, H., Platzgummer, E., Loeschner, H., Ebm, Ch, Grützner, G., Schöftner, R.

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A Moiré method for high accuracy alignment in nanoimprint lithography von Mühlberger, M., Bergmair, I., Schwinger, W., Gmainer, M., Schöftner, R., Glinsner, T., Hasenfuß, Ch, Hingerl, K., Vogler, M., Schmidt, H., Kley, E.B.

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Nanoimprint lithography from CHARPAN Tool exposed master stamps with 12.5 nm hp von MUEHIBERGER, M, BOEHM, M, PLATZGUMMER, E, LOESCHNER, H, JOECHL, P, EDER-KAPI, S, NARZT, T, LAUSECKER, E, FROMHERZ, T, BERGMAIR, I, CHOUIKI, M, SCHOEFTNER, R, KREINDL, G, KAST, M, TREIBLMAYR, D, GLINSNER, T, MILLER, R

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Effects of a compliant layer in solid parallel-plate UV-based nanoimprint lithography von Bergmair, I, Mühlberger, M, Gusenbauer, M, Schöftner, R, Glinsner, T, Hingerl, K

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Large area μm and sub-μm structuring of gold layers with microcontact printing using 4'' and 1'' PDMS stamps von Lausecker, E, Schwinger, W, Bergmair, I, Mühlberger, M, Schöftner, R

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Stamp degradation for high volume UV enhanced substrate conformal imprint lithography (UV-SCIL) von Haslinger, M.J., Verschuuren, M.A., van Brakel, R., Danzberger, J., Bergmair, I., Mühlberger, M.

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Nano- and microstructuring of graphene using UV-NIL von Bergmair, Iris, Hackl, Wolfgang, Losurdo, Maria, Helgert, Christian, Isic, Goran, Rohn, Michael, Jakovljevic, Milka M, Mueller, Thomas, Giangregorio, Maria, Kley, Ernst-Bernhard, Fromherz, Thomas, Gajic, Rados, Pertsch, Thomas, Bruno, Giovanni, Muehlberger, Michael

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Spectroscopic ellipsometry of split ring resonators at infrared frequencies von Jakovljević, M. M., Isić, G., Vasić, B., Oates, T. W. H., Hinrichs, K., Bergmair, I., Hingerl, K., Gajić, R.

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UV nanoimprint lithography for the realization of large-area orderedSiGe/Si(001) island arrays von Lausecker, E., Brehm, M., Grydlik, M., Hackl, F., Bergmair, I., Mühlberger, M., Fromherz, T., Schäffler, F., Bauer, G.

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Optical activity in sub-wavelength metallic grids and fishnet metamaterials in the conical mount von Oates, Thomas W. H., Dastmalchi, Babak, Helgert, Christian, Reissmann, Lars, Huebner, Uwe, Kley, Ernst-Bernhard, Verschuuren, Marc A., Bergmair, Iris, Pertsch, Thomas, Hingerl, Kurt, Hinrichs, Karsten

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Nanoimprint lithography from CHARPAN Tool exposed master stamps with 12.5nmhp von Muehlberger, M., Boehm, M., Bergmair, I., Chouiki, M., Schoeftner, R., Kreindl, G., Kast, M., Treiblmayr, D., Glinsner, T., Miller, R., Platzgummer, E., Loeschner, H., Joechl, P., Eder-Kapl, S., Narzt, T., Lausecker, E., Fromherz, T.

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Micromirror Arrays for Smart Personal Environments von Tatzel, A., Einwögerer, B., Bergmair, I., Worapattrakul, N., Khudhair, B., Viereck, V., Hillmer, H.

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Modelling the Variable Angle Reflection and Transmission from Metamaterial Slabs von Isić, G., Vasić, B., Mirić, M., Jokanović, B., Bergmair, I., Gajić, R., Hingerl, K.

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Design and fabrication of si-based photonic crystal stamps von Jannesari, R., Bergmair, I., Zamiri, S., Hingerl, K.

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