Mask Cost and Profitability in Photomask Manufacturing: An Empirical Analysis von Weber, C.M., Berglund, C.N., Gabella, P.

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Benchmarking the Productivity of Photomask Manufacturers von Berglund, C.N., Weber, C.M., Gabella, P.

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An exact algorithm for self-calibration of two-dimensional precision metrology stages von Ye, J., Takac, M., Berglund, C.N., Owen, G., Pease, R.F.

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High-throughput mapping of short-range spatial variations using active electrical metrology von Xu Ouyang, Berglund, C.N., Fabian, R.

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High-throughput high-density mapping and spectrum analysis of transistor gate length variations in SRAM circuits von Xu Ouyang, Deeter, T., Berglund, C.N., Pease, R.F.W., Lee, J., McCord, M.A.

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The Potential for Economic Application of Maskless Lithography in Semiconductor Manufacturing von Berglund, C.N., Leachman, R.C.

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A unified yield model incorporating both defect and parametric effects von Berglund, C.N.

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An Empirical Study of Photomask Manufacturing Productivity von Berglund, C.N., Weber, C.M., Castilla, C.

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A thin-film inductance using thermal filaments von Berglund, C.N., Walden, R.H.

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Exact algorithm self-calibration of two-dimensional precision metrology stages von Ye, J., Takac, M., Berglund, C.N., Owen, G., Pease, R.F.

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Surface states at steam-grown silicon-silicon dioxide interfaces von Berglund, C.N.

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A review of mask errors on a variety of pattern generators von Jun Ye, Berglund, C.N., Robinson, J., Pease, R.F.W.

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DISPOSITIF A TRANSFERT DE CHARGE A REGIONS DIFFUSEES von C.N. BERGLUND

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An Analysis of the Economics of Photomasks in Semciconductor Manufacturing von Berglund, C.N., Weber, C.M., Gabella, P.

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A strategic assessment of the photomask manufacturing industry von Weber, C.M., Berglund, C.N.

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Analog performance limitations of charge-transfer dynamic shift registers von Berglund, C.N.

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The bipolar transistor bucket-brigade shift register von Berglund, C.N.

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Acceleration management: the semiconductor industry confronts the 21st century von Appleyard, M.M., Berglund, C.N., Peterson, C., Smith, R.W.

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Thermal filaments in vanadium dioxide von Berglund, C.N.

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Thermal effects on switching of solids from an insulating to a conductive state von Berglund, C.N., Klein, N.

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