An exact algorithm for self-calibration of two-dimensional precision metrology stages von Ye, J., Takac, M., Berglund, C.N., Owen, G., Pease, R.F.

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A review of mask errors on a variety of pattern generators von Jun Ye, Berglund, C.N., Robinson, J., Pease, R.F.W.

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A unified yield model incorporating both defect and parametric effects von Berglund, C.N.

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High-throughput mapping of short-range spatial variations using active electrical metrology von Xu Ouyang, Berglund, C.N., Fabian, R.

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Mask Cost and Profitability in Photomask Manufacturing: An Empirical Analysis von Weber, C.M., Berglund, C.N., Gabella, P.

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High-throughput high-density mapping and spectrum analysis of transistor gate length variations in SRAM circuits von Xu Ouyang, Deeter, T., Berglund, C.N., Pease, R.F.W., Lee, J., McCord, M.A.

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Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents von Nicollian, E. H., Berglund, C. N., Schmidt, P. F., Andrews, J. M.

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Benchmarking the Productivity of Photomask Manufacturers von Berglund, C.N., Weber, C.M., Gabella, P.

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I–V characteristics of thin-film gated photocathodes for electron-beam lithography von Pei, Z., Berglund, C. N.

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Photoinjection Studies of Charge Distributions in Oxides of MOS Structures von Powell, R. J., Berglund, C. N.

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Temperature-Modulated Optical Absorption in Semiconductors von Berglund, C. N.

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AVALANCHE INJECTION CURRENTS AND CHARGING PHENOMENA IN THERMAL SiO2 von Nicollian, E. H., Goetzberger, A., Berglund, C. N.

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Performance limitations of the IGFET bucket-brigade shift register von Berglund, C.N., Boll, H.J.

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Measurement of Photoemitted Electron Energy Distributions by an ac Method von Spicer, W. E., Berglund, C. N.

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Stability improvement at high emission densities for gold thin film photocathodes used in advanced electron beam lithography von Gosavi, Suresh, McCarthy, J. M., House, J. L., Scholte van Mast, Bart G., Janaway, G., Berglund, C. N.

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Surface states at steam-grown silicon-silicon dioxide interfaces von Berglund, C.N.

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Thin-film gated photocathodes for electron-beam lithography von Pei, Z., McCarthy, J., Berglund, C. N., Chang, T. P. H., Mankos, M., Lee, K. Y., Yu, M. L.

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Electron Transport in Single-Domain, Ferroelectric Barium Titanate von Berglund, C. N., Baer, W. S.

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Optical Absorption in Single-Domain Ferroelectric Barium Titanate von Berglund, C. N., Braun, H. J.

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Surface Barrier Junctions on Semiconducting Ferroelectrics von Wemple, S. H., Kahng, D., Berglund, C. N., Van Uitert, L. G.

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