Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures von Berezhnoi, S.V., Kaganovich, I.D., Misina, M., Bogaerts, A., Gijbels, R.

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Mykola Oleksiyovych Azarenkov (to the 70th anniversary of his birth) von Bakai, O.S., Berezhnoi, Yu.A., Beresnev, V.M., Bizyukov, O.A., Bilous, V.A., Bulavin, L.A., Vovk, R.V., Garkusha, I.Ye, Girka, I.O., Grekov, D.L., Gryshanov, M.I., Denysenko, I.B., Karnaukhov, I.M., Katrych, V.O., Klepikov, V.F., Kondratenko, A.M., Korchyn, O.Yu, Kuklin, V.M., Lazuryk, V.T., Lytovchenko, S.V., Lisovskyi, V.O., Mchedlov-Petrosyan, M.O., Neklyudov, I.M., Olefir, V.P., Onishchenko, I.M., Rudychev, V.G., Slisenko, V.I., Slyusarenko, Yu.V., Storyzhko, V.Yu, Tkachenko, V.I., Chyshkala, V.O., Shul’ga, M.F., Zagorodny, A.G.

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