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  1. 1
    Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

    Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application von Gusmão Cacho, Maria Gabriela, Benotmane, Khatia, Pimenta-Barros, Patricia, Bouet, Charlotte, Rademaker, Guido, Argoud, Maxime, Navarro, Christophe, Tiron, Raluca, Possémé, Nicolas


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  2. 2
    Study of plasma etching impact on chemoepitaxy directed self-assembly

    Study of plasma etching impact on chemoepitaxy directed self-assembly von Gusmão Cacho, Maria Gabriela, Benotmane, Khatia, Le Pennec, Aurélie, Bouet, Charlotte, Pimenta-Barros, Patricia, Rademaker, Guido, Argoud, Maxime, Tiron, Raluca, Possémé, Nicolas


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