Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme von Liu, Wei, He, Jim Zhongyi, Ahn, Sang H, Shen, Meihua, M'Saad, Hichem, Yeh, Wendy H, Bencher, Chistopher D

Volltext bestellen

Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme von M'SAAD HI, LIU WEI, AHN SANG H, HE JIM ZHONGYI, BENCHER CHISTOPHER D, YEH WENDY H, SHEN MEIHUA

Volltext bestellen

Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme von M'SAAD HI, LIU WEI, AHN SANG H, BENCHER CHISTOPHER D, YEH WENDY H, HE JIM Z, SHEN MEIHUA

Volltext bestellen