Plasma processing of low-k dielectrics von Baklanov, Mikhail R., de Marneffe, Jean-Francois, Shamiryan, Denis, Urbanowicz, Adam M., Shi, Hualiang, Rakhimova, Tatyana V., Huang, Huai, Ho, Paul S.

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Pseudogap in a thin film of a conventional superconductor von Sacépé, Benjamin, Chapelier, Claude, Baturina, Tatyana I, Vinokur, Valerii M, Baklanov, Mikhail R, Sanquer, Marc

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Atomic Layer Deposition of TiO2 on Surface Modified Nanoporous Low‑k Films von Levrau, Elisabeth, Devloo-Casier, Kilian, Dendooven, Jolien, Ludwig, Karl F, Verdonck, Patrick, Meersschaut, Johan, Baklanov, Mikhail. R, Detavernier, Christophe

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Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus von Vanstreels, Kris, Wu, Chen, Gonzalez, Mario, Schneider, Dieter, Gidley, David, Verdonck, Patrick, Baklanov, Mikhail R

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Reentrant Resistive Behavior and Dimensional Crossover in Disordered Superconducting TiN Films von Postolova, Svetlana V., Mironov, Alexey Yu, Baklanov, Mikhail R., Vinokur, Valerii M., Baturina, Tatyana I.

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Porous low dielectric constant materials for microelectronics von Baklanov, Mikhail R, Maex, Karen

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Nanoscale Noncontact Subsurface Investigations of Mechanical and Optical Properties of Nanoporous Low-k Material Thin Film von Lomonosov, Alexey M, Ayouch, Adil, Ruello, Pascal, Vaudel, Gwenaelle, Baklanov, Mikhail R, Verdonck, Patrick, Zhao, Larry, Gusev, Vitalyi E

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In Situ Monitoring of Atomic Layer Deposition in Nanoporous Thin Films Using Ellipsometric Porosimetry von Dendooven, Jolien, Devloo-Casier, Kilian, Levrau, Elisabeth, Van Hove, Robbert, Pulinthanathu Sree, Sreeprasanth, Baklanov, Mikhail R, Martens, Johan A, Detavernier, Christophe

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Metal-Organic Framework ZIF‑8 Films As Low‑κ Dielectrics in Microelectronics von Eslava, Salvador, Zhang, Liping, Esconjauregui, Santiago, Yang, Junwei, Vanstreels, Kris, Baklanov, Mikhail R, Saiz, Eduardo

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Effect of terminal methyl groups concentration on properties of organosilicate glass low dielectric constant films von Liu, Chunhui, Qi, Qi, Seregin, Dmitry S., Vishnevskiy, Alexey S., Wang, Yingjie, Wei, Shuhua, Zhang, Jing, Vorotilov, Konstantin A., Dultsev, Fedor N., Baklanov, Mikhail R.

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UV-Excited Luminescence in Porous Organosilica Films with Various Organic Components von Rasadujjaman, Md, Zhang, Jinming, Spassky, Dmitry A, Naumov, Sergej, Vishnevskiy, Alexey S, Vorotilov, Konstantin A, Yan, Jiang, Zhang, Jing, Baklanov, Mikhail R

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Effect of methyl terminal and ethylene bridging groups on porous organosilicate glass films: FTIR, ellipsometric porosimetry, luminescence dataset von Rasadujjaman, Md, Zhang, Jinming, Mogilnikov, Konstantin P., Vishnevskiy, Alexey S., Zhang, Jing, Baklanov, Mikhail R.

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In-Situ Imaging of a Light-Induced Modification Process in Organo-Silica Films via Time-Domain Brillouin Scattering von Sandeep, Sathyan, Vishnevskiy, Alexey S, Raetz, Samuel, Naumov, Sergej, Seregin, Dmitry S, Husiev, Artem, Vorotilov, Konstantin A, Gusev, Vitalyi E, Baklanov, Mikhail R

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Capacitance measurements and k-value extractions of low- k films von Ciofi, Ivan, Baklanov, Mikhail R., Tőkei, Zsolt, Beyer, Gerald P.

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Removal of organic template of mesoporous organosilicate thin films using supercritical carbon dioxide fluids von Kondoh, Eiichi, Segawa, Koki, Watanabe, Mitsuhiro, Jin, Lianhua, Zhang, Liping, Baklanov, Mikhail R.

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Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance von Marsik, Premysl, Urbanowicz, Adam M., Verdonck, Patrick, De Roest, David, Sprey, Hessel, Baklanov, Mikhail R.

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Quantification of processing damage in porous low dielectric constant films von Baklanov, Mikhail R., Mogilnikov, Konstantin P., Le, Quoc Toan

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Influence of porosity on electrical properties of low-k dielectrics von Van Besien, Els, Pantouvaki, Marianna, Zhao, Larry, De Roest, David, Baklanov, Mikhail R., Tőkei, Zsolt, Beyer, Gerald

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Advanced Interconnects: Materials, Processing, and Reliability von Baklanov, Mikhail R., Adelmann, Christoph, Zhao, Larry, De Gendt, Stefan

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Superinsulator and quantum synchronization von Vinokur, Valerii M, Baturina, Tatyana I, Fistul, Mikhail V, Mironov, Aleksey Yu, Baklanov, Mikhail R, Strunk, Christoph

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