Reduction and Increase in Thermal Conductivity of Si Irradiated with Ga+ via Focused Ion Beam von Alaie, S, Baboly, M. G, Jiang, Y.-B, Rempe, S, Anjum, D. H, Chaieb, S, Donovan, B. F, Giri, A, Szwejkowski, C. J, Gaskins, J. T, Elahi, M. M. M, Goettler, D. F, Braun, J, Hopkins, P. E, Leseman, Z. C

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1D thermal characterization of micro/nano-cantilevers for Suspended ThermoReflectance measurements von Sarkar, Dipta, Brady, Jeffrey, Baboly, M. G., Xu, Leidong, Singh, Gurpreet, Leseman, Z. C.

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Determination of etching parameters for pulsed XeF2 etching of silicon using chamber pressure data von Sarkar, Dipta, Baboly, M G, Elahi, M M, Abbas, K, Butner, J, Piñon, D, Ward, T L, Hieber, Tyler, Schuberth, Austin, Leseman, Z C

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Determination of etching parameters for pulsed XeF 2 etching of silicon using chamber pressure data von Sarkar, Dipta, Baboly, M G, Elahi, M M, Abbas, K, Butner, J, Piñon, D, Ward, T L, Hieber, Tyler, Schuberth, Austin, Leseman, Z C

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