METHOD OF ANISOTROPIC ETCHING OF MESOSTRUCTURES von Brjukhno N.A

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PROCESS OF MANUFACTURE OF MICROCIRCUITS WITH DIELECTRIC INSULATION OF ELEMENTS von SHER T.B, BRJUKHNO N.A

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PROCESS OF MANUFACTURE OF TRANSISTOR STRUCTURES WITH DIELECTRIC INSULATION von LAZINA N.A, SHER T.B, BRJUKHNO N.A

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METHOD OF MANUFACTURE OF HIGH-VOLTAGE INTEGRATED CIRCUITS WITH DIELECTRIC INSULATION von GROMOV V.I, SHER T.B, BRJUKHNO N.A

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METHOD OF MANUFACTURING SEMICONDUCTIVE STRUCTURES von KOBAZEVA Z.N, MAKSIMENKOV I.G, BRJUKHNO N.A

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METHOD OF PRODUCING SILICONE INTEGRATED CIRCUITS WITH DIELECTRIC INSULATION OF COMPONENTS von Zharkovskij E.M, Sher T.B, Brjukhno N.A, Komarov Ju.A, Sakharov Ju.G

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METHOD OF MANUFACTURING SILICON TRANSISTOR STRUCTURES WITH DIELECTRIC INSULATION von KOMAROV JU.A, GROMOV V.I, KHOCHINOV JU.E, BRJUKHNO N.A, DANTSEV O.N

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REACTOR FOR PRECIPITATION OF LAYERS von ZHDANOV L.V, OGNEV V.V, SAFRONOV N.N, BRJUKHNO N.A

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METHOD OF MANUFACTURE OF MICROCIRCUITS von KONOVALOV S.A, SHER T.B, BRJUKHNO N.A, LEBEDEV A.S

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METHOD OF MANUFACTURING MICROCIRCUITS von KOMAROV JU.A, JULDASHEV G.F, USMANOVA M.M, DANTSEV O.N, BRJUKHNO N.A

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METHOD OF MANUFACTURING EPITAXIAL SILICON STRUCTURES von MATOVNIKOV V.A, OGNEV V.V, BRJUKHNO N.A, POLOVENKO V.T

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PROCESS OF MANUFACTURE OF SILICON STRUCTURES WITH DIELECTRIC INSULATION OF COMPONENTS OF INTEGRATED CIRCUITS von KONOVALOV S.A, OPALEV V.L, GROMOV V.I, SHER T.B, DOBROVICHAN P.P, BRJUKHNO N.A

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METHOD OF DISPLACING CILICIC MONOCRYSTAL PEDESTAL BASE von DOLGIKH S.I, MATOVNIKOV V.A, CHETVERIKOV A.M, BAKUN V.N, OGNEV V.V, BRJUKHNO N.A

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