On the effects of hydrogenation of thin film polycrystalline silicon: A key factor to improve heterojunction solar cells von Qiu, Yu, Kunz, Oliver, Fejfar, Antonin, Ledinský, Martin, Teik Chan, Boon, Gordon, Ivan, Van Gestel, Dries, Venkatachalm, Srisaran, Egan, Renate

Volltext

Hexagonal Hole Array Patterning for Memory Applications von Singh, Arjun, Chan, Boon Teik, Gronheid, Roel

Volltext

A Thermally Stable and High-Performance 90-nm Al2O3\Cu-Based 1T1R CBRAM Cell von BELMONTE, Attilio, WOOSIK KIM, BOON TEIK CHAN, HEYLEN, Nancy, FANTINI, Andrea, HOUSSA, Michel, JURCZAK, Malgorzata, GOUX, Ludovic

Volltext

Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing von Gronheid, Roel, Delgadillo, Paulina Rincon, Singh, Arjun, Younkin, Todd R., Suyan, Safak, Chan, Boon Teik, Look, Lieve Van, Bekaert, Joost, Pollentir, Ivan, Nealey, Paul F.

Volltext

28 nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy Directed Self-Assembly (DSA) process flow von BOON TEIK CHAN, TAHARA, Shigeru, PARNELL, Doni, DELGADILLO, Paulina A. Rincon, GRONHEID, Roel, DE MARNEFFE, Jean-François, KAIDONG XU, NISHIMURA, Eiichi, BOULLART, Werner

Volltext

A Thermally Stable and High-Performance 90-nm \backslash-Based 1T1R CBRAM Cell von Belmonte, Attilio, Woosik Kim, Boon Teik Chan, Heylen, Nancy, Fantini, Andrea, Houssa, Michel, Jurczak, Malgorzata, Goux, Ludovic

Volltext

Insight into Selective Surface Reactions of Dimethylamino-trimethylsilane for Area-Selective Deposition of Metal, Nitride, and Oxide von Soethoudt, Job, Tomczak, Yoann, Meynaerts, Ben, Chan, Boon Teik, Delabie, Annelies

Volltext

Two-Step Plasma-Texturing Process for Multicrystalline Silicon Solar Cells With Linear Microwave Plasma Sources von Boon Teik Chan, Kunnen, E., Kaidong Xu, Boullart, W., Poortmans, J.

Volltext

Study of SF6/N2O Microwave Plasma for Surface Texturing of Multicrystalline (${<}150$ μm) Solar Substrates von Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef

Volltext

Insight into Selective Surface Reactions of Dimethylamino-trimethylsilane for Area-Selective Deposition of Metal, Nitride, and Oxide von Soethoudt, Job, Tomczak, Yoann, Meynaerts, Ben, Chan, Boon Teik, Delabie, Annelies

Volltext

CFET SRAM DTCO, Interconnect Guideline, and Benchmark for CMOS Scaling von Liu, Hsiao-Hsuan, Salahuddin, Shairfe M, Chan, Boon Teik, Schuddinck, Pieter, Xiang, Yang, Hellings, Geert, Weckx, Pieter, Ryckaert, Julien, Catthoor, Francky

Volltext

CFET SRAM DTCO, Interconnect Guideline, and Benchmark for CMOS Scaling von Liu, Hsiao-Hsuan, Salahuddin, Shairfe M., Chan, Boon Teik, Schuddinck, Pieter, Xiang, Yang, Hellings, Geert, Weckx, Pieter, Ryckaert, Julien, Catthoor, Francky

Volltext

CFET SRAM With Double-Sided Interconnect Design and DTCO Benchmark von Liu, Hsiao-Hsuan, Schuddinck, Pieter, Pei, Zhenlin, Verschueren, Lynn, Mertens, Hans, Salahuddin, Shairfe M, Hiblot, Gaspard, Xiang, Yang, Chan, Boon Teik, Subramanian, Sujith, Weckx, Pieter, Hellings, Geert, Bardon, Marie Garcia, Ryckaert, Julien, Pan, Chenyun, Catthoor, Francky

Volltext

CFET SRAM With Double-Sided Interconnect Design and DTCO Benchmark von Liu, Hsiao-Hsuan, Schuddinck, Pieter, Pei, Zhenlin, Verschueren, Lynn, Mertens, Hans, Salahuddin, Shairfe M., Hiblot, Gaspard, Xiang, Yang, Chan, Boon Teik, Subramanian, Sujith, Weckx, Pieter, Hellings, Geert, Bardon, Marie Garcia, Ryckaert, Julien, Pan, Chenyun, Catthoor, Francky

Volltext

Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer von Marneffe, Jean-François de, Chan, Boon Teik, Spieser, Martin, Vereecke, Guy, Naumov, Sergej, Vanhaeren, Danielle, Wolf, Heiko, Knoll, Armin W.

Volltext

Defect Mitigation in Area‐Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns von Soethoudt, Job, Hody, Hubert, Spampinato, Valentina, Franquet, Alexis, Briggs, Basoene, Chan, Boon Teik, Delabie, Annelies

Volltext

Buried Power Rail Integration With FinFETs for Ultimate CMOS Scaling von Gupta, Anshul, Pedreira, Olalla Varela, Arutchelvan, Goutham, Zahedmanesh, Houman, Devriendt, Katia, Mertens, Hans, Tao, Zheng, Ritzenthaler, Romain, Wang, Shouhua, Radisic, Dunja, Kenis, Karine, Teugels, Lieve, Sebai, Farid, Lorant, Christophe, Jourdan, Nicolas, Chan, Boon Teik, Subramanian, Sujith, Schleicher, Filip, Hopf, Toby, Peter, Antony Premkumar, Rassoul, Nouredine, Debruyn, Haroen, Demonie, Ingrid, Siew, Yong Kong, Chiarella, Thomas, Briggs, Basoene, Zhou, Xiuju, Rosseel, Erik, De Keersgieter, An, Capogreco, Elena, Litta, Eugenio Dentoni, Boccardi, Guillaume, Baudot, Sylvain, Mannaert, Geert, Bontemps, Noemie, Sepulveda, A., Mertens, Sofie, Kim, Min-Soo, Dupuy, Emmanuel, Vandersmissen, Kevin, Paolillo, Sara, Yakimets, Dmitry, Chehab, Bilal, Favia, Paola, Drijbooms, Christel, Cousserier, Joris, Jaysankar, Manoj, Lazzarino, Frederic, Morin, Pierre, Altamirano, Efrain, Mitard, Jerome, Wilson, Christopher J., Holsteyns, Frank, Boemmels, Juergen, Demuynck, Steven, Tokei, Zsolt, Horiguchi, Naoto

Volltext

Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication von Doise, Jan, Bekaert, Joost, Chan, Boon Teik, Gronheid, Roel, Cao, Yi, Hong, SungEun, Lin, Guanyang, Fishman, Daniel, Chakk, Yuli, Marzook, Taisir

Volltext

Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns von Soethoudt, Job, Hody, Hubert, Spampinato, Valentina, Franquet, Alexis, Briggs, Basoene, Chan, Boon Teik, Delabie, Annelies

Volltext

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology von Lenk, Claudia, Krivoshapkina, Yana, Hofmann, Martin, Lenk, Steve, Ivanov, Tzvetan, Rangelow, Ivo W., Ahmad, Ahmad, Reum, Alexander, Holz, Mathias, Glinsner, Thomas, Eibelhuber, Martin, Treiblmayr, Dominik, Schamberger, Barbara, Chouiki, Mustapha, Chan, Boon Teik, el Otell, Ziad, de Marneffe, Jean-François

Volltext