Sub-micron periodic structuring of sapphire by laser induced backside wet etching technique von Pissadakis, Stavros, Böhme, Rico, Zimmer, Klaus

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Device and method for cutting out contours from planar substrates by means of laser von Bohme, Rico

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DEVICE AND METHOD FOR CUTTING OUT CONTOURS FROM PLANAR SUBSTRATES BY MEANS OF LASER von Bohme, Rico

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Device and method for cutting out contours from planar substrates by means of laser von Bohme, Rico

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Laser-induced Writing of Submicron Surface Relief Gratings in Fused Silica on the Fly von Böhme, Rico

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DEVICE AND METHOD FOR CUTTING OUT CONTOURS FROM PLANAR SUBSTRATES BY MEANS OF LASER von Bohme Rico

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Simulation of laser-induced backside wet etching of fused silica with hydrocarbon liquids von Zimmer, Klaus, Ehrhardt, Martin, Böhme, Rico

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Comprehensive Simulation and Acceleration of the Foil-metallization Laser Process von Graf, Martin, Nekarda, Jan, Togny, Franciana Lazzarotto, Streek, André, Böhme, Rico, Preu, Ralf

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Nanostructures by diffraction mask projection laser ablation von Mäder, Marisa, Höche, Thomas, Gerlach, Jürgen W., Böhme, Rico, Rauschenbach, Bernd

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Laser techniques for foil-based metallization of solar cells von Bohme, Rico, Nicht, Markus, Weber, Daniel Maria, Harley, Gabriel, Elbandrawy, Mohamed A, Kleshock, Mark, Moors, Matthieu, Kim, Taeseok, Gjukic, Mario

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Nanostructures by diffraction mask projection laser ablation : Architecture of Nano- and Microdimensional Building Blocks von MÄDER, Marisa, HÖCHE, Thomas, GERLACH, Jürgen W, BÖHME, Rico, RAUSCHENBACH, Bernd

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Semiconductor Nanowires Prepared by Diffraction-Mask-Projection Excimer-Laser Patterning von Höche, Thomas, Böhme, Rico, Gerlach, Jürgen W, Frost, Frank, Zimmer, Klaus, Rauschenbach, Bernd

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Backside Etching at the Interface to Diluted Medium with Nanometer Etch Rates von Böhme, Rico

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Method and device for laser-based machining of planar, crystalline substrates, in particular of semiconductor substrates von BOHME, RICO, WEBER, DANIEL

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Excimer laser-induced material modification to create nanometer high smooth patterns in glass using mask projection von Rudolph, Thomas, Zimmer, Klaus, Böhme, Rico, Ruthe, David

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Enhancing the Etch Rate at Backside Etching of Fused Silica von Zimmer, Klaus

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Method and device for the laser-based working of two-dimensional, crystalline substrates, in particular semiconductor substrates von Böhme, Rico, Weber, Daniel

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LASER TECHNIQUES FOR FOIL-BASED METALLIZATION OF SOLAR CELLS von Bohme, Rico, Nicht, Markus, Weber, Daniel Maria, Harley, Gabriel, Elbandrawy, Mohamed A, Kleshock, Mark, Moors, Matthieu, Kim, Taeseok, Gjukic, Mario

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Laser techniques for foil-based metallization of solar cells von Gjukic Mario, Kim Taeseok, Moors Matthieu, Harley Gabriel, Nicht Markus, Weber Daniel Maria, Bohme Rico, Elbandrawy Mohamed A, Kleshock Mark

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LASER TECHNIQUES FOR FOIL-BASED METALLIZATION OF SOLAR CELLS von ELBANDRAWY, Mohamed A, HARLEY, Gabriel, KIM, Taeseok, WEBER, Daniel Maria, MOORS, Matthieu, BOHME, Rico, GJUKIC, Mario, NICHT, Markus, KLESHOCK, Mark

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