Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures von Schmidt, Rainer, Mayrhofer, Patrick, Schmid, Ulrich, Bittner, Achim

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High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient von Wang, Wenbo, Mayrhofer, Patrick M., He, Xingli, Gillinger, Manuel, Ye, Zhi, Wang, Xiaozhi, Bittner, Achim, Schmid, Ulrich, Luo, J. K.

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Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers von Becker, Dennis, Littwin, Moritz, Bittner, Achim, Dehé, Alfons

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A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms von Beigelbeck, Roman, Schneider, Michael, Schalko, Johannes, Bittner, Achim, Schmid, Ulrich

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Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode von Kucera, Martin, Wistrela, Elisabeth, Pfusterschmied, Georg, Ruiz-Díez, Víctor, Manzaneque, Tomás, Hernando-García, Jorge, Sánchez-Rojas, José Luis, Jachimowicz, Artur, Schalko, Johannes, Bittner, Achim, Schmid, Ulrich

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Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes von Kucera, Martin, Wistrela, Elisabeth, Pfusterschmied, Georg, Ruiz-Díez, Víctor, Manzaneque, Tomás, Luis Sánchez-Rojas, José, Schalko, Johannes, Bittner, Achim, Schmid, Ulrich

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Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media von Kucera, Martin, Wistrela, Elisabeth, Pfusterschmied, Georg, Ruiz-Díez, Víctor, Sánchez-Rojas, José Luis, Schalko, Johannes, Bittner, Achim, Schmid, Ulrich

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Plasma techniques in the production of customized MEMS‐applications von Bittner, Achim, Hochstein, David, Rockstroh, Jan, Dehnert, Jan, Hedrich, Frank, Billat, Sophie, Dehé, Alfons

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Sensor-Based Nerve Compression Measurement: A Scoping Review of Current Concepts and a Preclinical Evaluation of Commercial Microsensors von Daeschler, Simeon C., Wienbruch, Rebecca, Bursacovschi, Catalina, Zimmermann, Kim Sophie, Nemariam, Selam Bekure, Harhaus, Leila, Kneser, Ulrich, Dehé, Alfons, Bittner, Achim

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Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring von Pfusterschmied, Georg, Toledo, Javier, Kucera, Martin, Steindl, Wolfgang, Zemann, Stefan, Ruiz-Díez, Víctor, Schneider, Michael, Bittner, Achim, Sanchez-Rojas, Jose Luis, Schmid, Ulrich

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Development of an Indirect Photoacoustic Sensor Concept for Highly Accurate Low-ppm Gas Detection von Ananya Srivastava, Achim Bittner, Alfons Dehé

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Arrays of open, independently tunable microcavities von Derntl, Christian, Schneider, Michael, Schalko, Johannes, Bittner, Achim, Schmiedmayer, Jörg, Schmid, Ulrich, Trupke, Michael

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Permittivity reduction and surface modification by porosification of LTCC von Steinhäußer, Frank, Talai, Armin, Weigel, Robert, Koelpin, Alexander, Bittner, Achim, Schmid, Ulrich

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Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach von Schneider, Michael, Bittner, Achim, Schmid, Ulrich

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The effect of quercetin on the mRNA expression of different antioxidant enzymes in hepatoma cells von RÖHRDANZ, Elke, BITTNER, Achim, TRAN-THI, Quynh-Hoa, KAHL, Regine

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Wet chemical porosification of LTCC in phosphoric acid: Anorthite forming tapes von Steinhäußer, Frank, Hradil, Klaudia, Schwarz, Sabine, Artner, Werner, Stöger-Pollach, Michael, Steiger-Thirsfeld, Andreas, Bittner, Achim, Schmid, Ulrich

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Permittivity of modified polyimide layers on LTCC von Bittner, Achim, Seidel, Helmut, Schmid, Ulrich

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Wet chemical porosification of LTCC in phosphoric acid: Celsian forming tapes von Steinhäußer, Frank, Hradil, Klaudia, Schwarz, Sabine, Artner, Werner, Stöger-Pollach, Michael, Steiger-Thirsfeld, Andreas, Bittner, Achim, Schmid, Ulrich

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Temperature Dependent Pore Formation in Metal Assisted Chemical Etching of Silicon von Backes, Andreas, Leitgeb, Markus, Bittner, Achim, Schmid, Ulrich

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Graphical based characterisation and modelling of material gradients in porosified LTCC von Steinhäußer, Frank, Talai, Armin, Steiger-Thirsfeld, Andreas, Koelpin, Alexander, Weigel, Robert, Bittner, Achim, Schmid, Ulrich

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