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  1. 1
    Calculation of a Al–Ti–O–N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization

    Calculation of a Al–Ti–O–N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization von Caron, Mario, Gagnon, Gilles, Fortin, Vincent, Currie, John F., Ouellet, Luc, Tremblay, Yves, Biberger, Max, Reynolds, Reese

    Veröffentlicht in Journal of applied physics

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  2. 2
    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter

    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter von D'Couto, Gerard, Tkach, George, Lyons, Jeff, Biberger, Max, Lai, Kwok, Lu, Jean, Ashtiani, Kaihan

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  3. 3
    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter

    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter von D'Couto, Gerard Chris, Tkach, George, Lyons, Jeff Dewayne, Biberger, Max, Lai, Kwok Fai, Lu, Jean, Ashtiani, Kaihan

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  4. 4
    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter

    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter von BIBERGER MAX, LAI KWOK FAI, TKACH GEORGE, ASHTIANI KAIHAN, LYONS JEFF DEWAYNE, D'COUTO GERARD CHRIS, LU JEAN

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  5. 5
    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter

    PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter von BIBERGER MAX, LAI KWOK FAI, TKACH GEORGE, ASHTIANI KAIHAN, LYONS JEFF DEWAYNE, D'COUTO GERARD CHRIS, LU JEAN

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