Fluidized-bed atomic layer deposition reactor for the synthesis of core-shell nanoparticles von Didden, Arjen P., Middelkoop, Joost, Besling, Wim F. A., Nanu, Diana E., van de Krol, Roel

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Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy von Puurunen, Riikka L., Vandervorst, Wilfried, Besling, Wim F. A., Richard, Olivier, Bender, Hugo, Conard, Thierry, Zhao, Chao, Delabie, Annelies, Caymax, Matty, De Gendt, Stefan, Heyns, Marc, Viitanen, Minna M., de Ridder, Marco, Brongersma, Hidde H., Tamminga, Yde, Dao, Thuy, de Win, Toon, Verheijen, Marcel, Kaiser, Monja, Tuominen, Marko

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Diffusion Barrier Deposition on a Copper Surface by Atomic Layer Deposition von Elers, K.-E., Saanila, V., Soininen, P. J., Li, W.-M., Kostamo, J. T., Haukka, S., Juhanoja, J., Besling, W. F. A.

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Copper alloy seed integration for reliability improvement von Besling, Wim F.A., Federspiel, X., Vanypre, T., Torres, Joaquin

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Continuity and morphology of TaN barriers deposited by Atomic Layer Deposition and comparison with physical vapor deposition von Besling, Wim F.A., Ignacimouttou, Marie-Laurence, Humbert, Aurelie, Mellier, Maxime, Torres, Joaquin

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RF Characterization and Analytical Modelling of Through Silicon Vias and Coplanar Waveguides for 3D Integration von Lamy, Y P R, Jinesh, K B, Roozeboom, F, Gravesteijn, D J, Besling, W F A

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Dielectric Material Options for Integrated Capacitors von Ruhl, Guenther, Lehnert, Wolfgang, Lukosius, Mindaugas, Wenger, Christian, Baristiran Kaynak, Canan, Blomberg, Tom, Haukka, Suvi, Baumann, Peter K., Besling, Wim, Roest, Aarnoud, Riou, Benoit, Lhostis, Sandrine, Halimaou, Aomar, Roozeboom, Fred, Langereis, Erik, Kessels, W. M. M., Zauner, Andy, Rushworth, Simon

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Development of sub-10-nm atomic layer deposition barriers for Cu/low- k interconnects von Beyer, Gerald, Satta, Alessandra, Schuhmacher, Jörg, Maex, Karen, Besling, Wim, Kilpela, Olli, Sprey, Hessel, Tempel, Georg

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Method for fabricating a structure for a semiconductor device using a halogen based precursor von BESLING WIM

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Method for fabricating a structure for a semiconductor device using a halogen based precursor von Besling, Wim

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MOVABLE APPARATUSES OPERABLE FOR ORIENTATION DETERMINATIONS USING MULTIPLE PRESSURE SENSORS von PENNINGS, Maarten, BESLING, Wim, HABIBI, Hooman

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Structure for a semiconductor device and a method of manufacturing the same von Besling, Wim

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Structure for a semiconductor device and a method of manufacturing the same von BESLING WIM

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Method of forming an interconnect structure on an integrated circuit die von Besling, Wim

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Method of forming an interconnect structure on an integrated circuit die von BESLING WIM

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High density capacitor von BESLING WIM, REIMANN KLAUS

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METHOD OF FORMING AN INTERCONNECT STRUCTURE ON AN INTEGRATED CIRCUIT DIE von BESLING WIM

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A METHOD OF FABRICATING A STRUCTURE FOR A SEMICONDUCTOR DEVICE von BESLING, WIM

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Method of Fabricating a Structure for a Semiconductor Device von BESLING WIM

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Structure for a Semiconductor Device and a Method of Manufacturing the Same von BESLING WIM

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