High‐Performance Coplanar Dual‐Channel a‐InGaZnO/a‐InZnO Semiconductor Thin‐Film Transistors with High Field‐Effect Mobility von Billah, Mohammad Masum, Siddik, Abu Bakar, Kim, Jung Bae, Yim, Dong Kil, Choi, Soo Young, Liu, Jian, Severin, Daniel, Hanika, Markus, Bender, Marcus, Jang, Jin

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Split sputter mode: a novel sputtering method for flat-panel display manufacturing von Pieralisi, Fabio, Hanika, Markus, Scheer, Evelyn, Bender, Marcus

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Dual-Layer Thin-Film Transistor Analysis and Design von Wager, John F., Kim, Jung Bae, Severin, Daniel, Hung, Zero, Yim, Dong Kil, Choi, Soo Young, Bender, Marcus

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Highly Sensitive ZnO Ozone Detectors at Room Temperature von Bender, Marcus, Fortunato, Elvira, Nunes, Patrícia, Ferreira, Isabel, Marques, António, Martins, Rodrigo, Katsarakis, Nikos, Cimalla, Volker, Kiriakidis, George

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Multi-oxide active layer deposition using Applied Materials Pivot array coater for high-mobility metal oxide TFT von Park, Hyun Chan, Scheer, Evelyn, Witting, Karin, Hanika, Markus, Bender, Marcus, Hsu, Hao Chien, Yim, Dong Kil

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7‐3: Invited Paper: High Mobility Self‐Aligned Coplanar Thin‐Film Transistors with a Novel Dual Channel Oxide Semiconductor Architecture von Kim, Jung Bae, Yim, Dong Kil, Choi, Soo Young, Severin, Daniel, Liu, Jian, Hanika, Markus, Bender, Marcus, Billah, Mohammad Masum, Siddik, Abu Bakar, Jang, Jin

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(Invited) Highly Stable Self-Aligned Top-Gate Indium Gallium Zinc Oxide Thin-Film Transistors for High-Resolution OLED TV and Mobile Displays von Kim, Jung Bae, Tsai, Yun-chu (Pipi), Lim, Rodney, Wang, Zhiyuan, Hao, Mei, Wang, Sheng-Wen (Gordon), Park, Jung Woo, Zhao, Lai, Bender, Marcus, Yim, Dong Kil, Choi, Soo Young

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62‐1: Invited Paper: Highly Stable Self‐Aligned Coplanar InGaZnO Thin‐Film Transistors and Investigation on Effective Channel Length von Kim, Jung Bae, Lim, Rodney, Tsai, Yun-chu (Pipi), Wang, Jiarui, Zhao, Lai, Choi, Soo Young, Bender, Marcus, Yim, Dong Kil

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76‐1: Invited Paper : Optimization of Applied Materials PiVot TM Array Coater for Metal Oxide Semiconductor Layers von Park, Hyun Chan, Kloeppel, Andreas, Bhoolokam, Ajay Sampath, Hanika, Markus, Bender, Marcus, Busch, John D, Hsu, Hao-Chien, Yim, Dong Kil

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76‐1: Invited Paper: Optimization of Applied Materials PiVotTM Array Coater for Metal Oxide Semiconductor Layers von Park, Hyun Chan, Kloeppel, Andreas, Bhoolokam, Ajay Sampath, Hanika, Markus, Bender, Marcus, Busch, John D, Hsu, Hao-Chien, Yim, Dong Kil

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Properties of rf-sputtered indium–tin-oxynitride thin films von Aperathitis, Elias, Bender, Marcus, Cimalla, Volker, Ecke, Gernot, Modreanu, Mircea

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38.5L: Late‐News Paper : PVD SiO 2 for Metal‐Oxide TFT Application von Graw, Oliver, Scheer, Evelyn, Hellmich, Anke, Bender, Marcus

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38.5L: Late-News Paper: PVD SiO2 for Metal-Oxide TFT Application von Graw, Oliver, Scheer, Evelyn, Hellmich, Anke, Bender, Marcus

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METHOD FOR GENERATING A LAYER STACK AND METHOD FOR MANUFACTURING A PATTERNED LAYER STACK von BENDER, Marcus, GRILLMAYER, Jürgen, HUANG, Hsiuyu

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METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRATE AND SPUTTER DEPOSITION APPARATUS von LIM, Rodney Shunleong, BENDER, Marcus, GRILLMAYER, Jürgen, TSAI, Yun-Chu, KIM, Jung Bae, YIM, Dong Kil

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30.4: Vertical Inline Deposition Technology for Full-Color OLED Production von Hoffmann, Uwe, Bender, Marcus, Campo, Manuel, Sommer, Elisabeth

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Split sputter mode: a novel sputtering method for flat-panel display manufacturing von Pieralisi, Fabio, Hanika, Markus, Scheer, Evelyn, Bender, Marcus

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METHOD OF DEPOSITING MATERIAL ON A SUBSTRATE von HELLMICH, Anke, BENDER, Marcus, CHOI, Soo Young, HINTERSCHUSTER, Reiner, ZILBAUER, Thomas Werner, MUNDORF, Christoph

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(Invited) Highly Stable Self-Aligned Top-Gate Indium Gallium Zinc Oxide Thin-Film Transistors for High-Resolution OLED TV and Mobile Displays von Kim, Jung Bae, Tsai, Yun-chu (Pipi), Lim, Rodney, Wang, Zhiyuan, Hao, Mei, Wang, Sheng-Wen (Gordon), Park, Jung Woo, Zhao, Lai, Bender, Marcus, Yim, Dong Kil, Choi, Soo Young

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METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRATE AND SPUTTER DEPOSITION APPARATUS von LIM, Rodney Shunleong, BENDER, Marcus, GRILLMAYER, Jürgen, TSAI, Yun-Chu, KIM, Jung Bae, YIM, Dong Kil

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