Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching von Brugger, J., Beljakovic, G., Despont, M., de Rooij, N.F., Vettiger, P.

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Low-cost PDMS seal ring for single-side wet etching of MEMS structures von Brugger, J., Beljakovic, G., Despont, M., Biebuyck, H., de Rooij, N.F., Vettiger, P.

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Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry von Brugger, J., Willemin, M., Rossel, C., Beljakovic, G., Vettiger, P.

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Low-cost PDMS seal ring for single-side wet etching of MEMS structures: Technical Digest for Transducers '97 von BRUGGER, J, BELJAKOVIC, G, DESPONT, M, BIEBUYCK, H, DE ROOIJ, N. F, VETTIGER, P

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High-yield wafer chuck for single-sided wet etching of MEMS structures von Brugger, J., Beljakovic, G., Despont, M., Biebuyck, H., de Rooij, N.F., Vettiger, P.

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Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns von DESPONT, M, BELJAKOVIC, G, STEBLER, C, STAUFER, U, VETTIGER, P, DE ROOIJ, N.-F

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Silicon Micro/Nanomechanical Device Fabrication Based on Focused Ion Beam Surface Modification and KOH Etching von Brugger, J, Beljakovic, G, Despont, M, de Rooij, N F, Vettiger, P

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Low-cost PDMS seal ring for single-side wet etching of MEMS structures von Brugger, J, Beljakovic, G, Despont, M, Biebuyck, H, de Rooij, N F, Vettiger, P

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