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  1. 1
    Uniform high-k metal gate stacks by adjusting threshold voltage for sophisticated transistors by diffusing a metal species prior to gate patterning

    Uniform high-k metal gate stacks by adjusting threshold voltage for sophisticated transistors by diffusing a metal species prior to gate patterning von CARTER RICHARD, REIMER BERTHOLD, GRAETSCH FALK, BINDER ROBERT, BAYAH BORIS, TRENTZSCH MARTIN, BEYER SVEN

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  2. 2
    UNIFORM HIGH-K METAL GATE STACKS BY ADJUSTING THRESHOLD VOLTAGE FOR SOPHISTICATED TRANSISTORS BY DIFFUSING A METAL SPECIES PRIOR TO GATE PATTERNING

    UNIFORM HIGH-K METAL GATE STACKS BY ADJUSTING THRESHOLD VOLTAGE FOR SOPHISTICATED TRANSISTORS BY DIFFUSING A METAL SPECIES PRIOR TO GATE PATTERNING von BAYAH, BORIS, GRAETSCH, FALK, REIMER, BERTHOLD, TRENTZSCH, MARTIN, BINDER, ROBERT, BEYER, SVEN, CARTER, RICHARD

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  3. 3
    UNIFORM HIGH-K METAL GATE STACKS BY ADJUSTING THRESHOLD VOLTAGE FOR SOPHISTICATED TRANSISTORS BY DIFFUSING A METAL SPECIES PRIOR TO GATE PATTERNING

    UNIFORM HIGH-K METAL GATE STACKS BY ADJUSTING THRESHOLD VOLTAGE FOR SOPHISTICATED TRANSISTORS BY DIFFUSING A METAL SPECIES PRIOR TO GATE PATTERNING von CARTER RICHARD, REIMER BERTHOLD, GRAETSCH FALK, BINDER ROBERT, BAYAH BORIS, TRENTZSCH MARTIN, BEYER SVEN

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