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  1. 1
    LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASPECT RATIO STRUCTURES

    LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASPECT RATIO STRUCTURES von CHEN Jian J, FUNG Miguel S, JHA Praket P, KIM Bok Hoen, BARMAN Soumendra Narayan

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  2. 2
    LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASPECT RATIO STRUCTURES

    LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASPECT RATIO STRUCTURES von BARMAN, Soumendra Narayan, KIM, Bok Hoen, JHA, Praket P, CHEN, Jian J, FUNG, Miguel S

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  3. 3
    LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASPECT RATIO STRUCTURES

    LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASPECT RATIO STRUCTURES von BARMAN SOUMENDRA NARAYAN, CHEN JIAN J, FUNG MIGUEL S, KIM BOK HOEN, JHA PRAKET P

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  4. 4
    고 종횡비 구조들 상의 실리콘 질화물의 저온 등각적 증착

    고 종횡비 구조들 상의 실리콘 질화물의 저온 등각적 증착 von BARMAN SOUMENDRA NARAYAN, CHEN JIAN J, FUNG MIGUEL S, KIM BOK HOEN, JHA PRAKET P

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