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  1. 1
    Methods of forming protective coatings on process chamber surfaces or components

    Methods of forming protective coatings on process chamber surfaces or components von GORADIA, PRINA, SONTHEERIA, KADAM, ANKUR, BARIK, UJITA, BAJAJ, JITIKA

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  2. 2
    Deposition of silicon-based dielectric films

    Deposition of silicon-based dielectric films von GANGULI SESHADRI, BAJAJ, JITIKA, VISSER ROBERT JAN, GANDIKOTA, SRINIVAS, RAGARAJAN, SRIKANTH, GORADIA PRENA SANTALIA

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  3. 3
    Protective multilayer coating for processing chamber components

    Protective multilayer coating for processing chamber components von GORADIA, PRINA, SONTHEERIA, KADAM, ANKUR, BARIK, UJITA, BAJAJ, JITIKA, THAKKAR, DARSHAN, PAPKE KEVIN A

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  4. 4
    Ultrathin conformal coating for electrostatic dissipation in semiconductor process tools

    Ultrathin conformal coating for electrostatic dissipation in semiconductor process tools von MUTHUKAMATZ, KARUPPASAMY, FENWICK DAVID, HE XIAOMING, NATU, JAYATRI, THANU, RAJKUMAR, SUN JENNIFER, BAJAJ, JITIKA, THAKKAR, DARSHAN, DAYALAN, ARUN, HUDGENS JEFFREY, GORADIA, PRERNA, SEPAELE, SONNY

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