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Research on efficient and stable control of EUV-induced hydrogen plasma
Veröffentlicht in Journal of applied physics
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Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers
Veröffentlicht in Vacuum
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Application of adaptive filtering algorithm to the stability problem for double crystal monochromator. Part I: Typical filtering algorithms
Veröffentlicht in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment
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