Adaptive Feedforward for a Wafer Stage in a Lithographic Tool von Butler, Hans

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Acceleration feedback in a lithographic tool von Butler, Hans

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Structured physics-guided neural networks for electromagnetic commutation applied to industrial linear motors von Bolderman, Max, Lazar, Mircea, Butler, Hans

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Magnetic disturbance compensation for a reticle stage in a lithographic tool von Butler, Hans

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Feedforward signal prediction for accurate motion systems using digital filters von Butler, Hans

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Mixed feedback and feedforward control design for multi-axis vibration isolation systems von Beijen, Michiel A., Heertjes, Marcel F., Butler, Hans, Steinbuch, Maarten

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Disturbance feedforward control for active vibration isolation systems with internal isolator dynamics von Beijen, Michiel A., Heertjes, Marcel F., Butler, Hans, Steinbuch, Maarten

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Physics-guided neural networks for feedforward control with input-to-state-stability guarantees von Bolderman, Max, Butler, Hans, Koekebakker, Sjirk, van Horssen, Eelco, Kamidi, Ramidin, Spaan-Burke, Theresa, Strijbosch, Nard, Lazar, Mircea

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Cable connection to decrease the passing on of vibrations from a first object to a second object von Butler, Hans

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On Improved Commutation for Moving-Magnet Planar Actuators von Broens, Yorick, Butler, Hans, Toth, Roland

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Active Deformation Control for a Magnetically Levitated Planar Motor Mover von Proimadis, Ioannis, Custers, Coen H. H. M., Toth, Roland, Jansen, J. W., Butler, Hans, Lomonova, Elena, Hof, Paul M. J. Van den

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High-Precision Force Control of Short-Stroke Reluctance Actuators with an Air Gap Observer von Katalenic, Andelko, Butler, Hans, van den Bosch, Paul P. J.

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Fractional-order filters for active damping in a lithographic tool von Butler, Hans, de Hoon, Corné

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METHOD AND SYSTEM TO CONTROL THE POSITION OF AN OPTICAL ELEMENT von BUTLER, Hans

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IMAGE POSITIONING CONTROL METHOD AND SYSTEM von BUTLER, Hans

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IMAGE POSITIONING CONTROL METHOD AND SYSTEM von BUTLER, Hans

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METHOD AND SYSTEM TO CONTROL THE POSITION OF AN OPTICAL ELEMENT von BUTLER, Hans

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ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTO... von BUTLER, Hans

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ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTO... von HANS BUTLER

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ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF DETERMINING A MOTOR-DEPENDENT COMMUTATION MODEL FOR AN ELECTROMAGNETIC MOTO... von BUTLER, Hans

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