METHOD AND DEVICE FOR INCREASING LATERAL UNIFORMITY AND DENSITY OF LOW-TEMPERATURE PLASMA IN WIDE-APERTURE MICROELECTRONICS PROCESS REACTORS von Rylov Aleksej Anatolevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Antipov Aleksandr Pavlovich, Myakonkikh Andrej Valerevich

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METHOD FOR PRODUCTION OF TUNNELLING MULTI-GATE FIELD NANOTRANSISTOR WITH SCHOTTKY CONTACTS von Vyurkov Vladimir Vladimirovich, Svintsov Dmitrij Aleksandrovich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Krivospitskij Anatolij Dmitrievich, Myakonkikh Andrej Valerevich

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METHOD OF ANISOTROPIC PLASMA ETCHING OF SILICON MICROSTRUCTURES IN A CYCLIC TWO-STEP OXIDATION-ETCHING PROCESS von Rylov Aleksej Anatolevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Antipov Aleksandr Pavlovich, Myakonkikh Andrej Valerevich

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MODE OF FABRICATION OF SEMICONDUCTOR SHF LIMITER DIODES BY GROUP METHOD von FILATOV MIKHAIL JUR'EVICH, AVERKIN SERGEJ NIKOLAEVICH, KOLMAKOVA TAMARA PAVLOVNA

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FORMING OF MULTILEVEL COPPER INTERCONNECTIONS OF MICRO IC WITH APPLICATION OF TUNGSTEN RIGID MASK von IGNATOV PAVEL VIKTOROVICH, KRASNIKOV GENNADIJ JAKOVLEVICH, TJURIN IGOR' ALEKSEEVICH, AVERKIN SERGEJ NIKOLAEVICH, BAKLANOV MIKHAIL RODIONOVICH, DANILA ANDREJ VLADIMIROVICH, GVOZDEV VLADIMIR ALEKSANDROVICH, JANOVICH SERGEJ IGOREVICH, BURJAKOVA TAT'JANA LEONT'EVNA, GUSHCHIN OLEG PAVLOVICH

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MANUFACTURING METHOD OF MULTI-LEVEL COPPER METALLISATION OF VLSIC von SHELEPIN NIKOLAJ ALEKSEEVICH, KRASNIKOV GENNADIJ JAKOVLEVICH, VASIL'EV VLADIMIR ALEKSANDROVICH, AVERKIN SERGEJ NIKOLAEVICH, VOROTILOV KONSTANTIN ANATOL'EVICH, VALEEV ADIL' SALIKHOVICH, GUSHCHIN OLEG PAVLOVICH

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DEVICE TO COLLECT AND ACCUMULATE ENERGY OF LOW-FREQUENCY MAGNETIC FIELD AND MECHANICAL OSCILLATIONS von AVERKIN SERGEJ VLADIMIROVICH, PETROV ROMAN VALER'EVICH, BICHURIN MIRZA IMAMOVICH, IVANOV DMITRIJ NIKOLAEVICH

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