Synthesis and characterization of thin amorphous carbon films doped with nitrogen on (001) Si substrates von Balchev, I, Tzvetkova, Kr, Kolev, S, Terziiska, P, Szekeres, A, Miloushev, I, Tenev, T, Antonova, K, Peyeva, R, Ivanova, T, Avramova, I, Tzvetkov, M, Avdreev, G, Valcheva, E, Milenov, T, Tinchev, S

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