A Hybrid Dry-Wet Approach for Removal of a Dummy Polysilicon Gate in a Replacement Metal Gate Scheme von Lin, Mark, Kamarthy, Gowri, Liao, J.H., Chen, Eason, Xu, Kai Dong, Athayde, Amulya, Huang, Weien, Tzou, S.F., Lou, David, Hwang, Guang Yaw, Yeh, Autumn

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High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods von Merry, Nir, Pannese, Patrick, Reuter, Paul B, Narasimhan, Murali, Athayde, Amulya L, Hruzek, Dean C

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HIGH FLOW VELOCITY, GAS-PURGED, SIDE STORAGE POD APPARATUS, ASSEMBLIES, AND METHODS von REUTER, Paul B, ATHAYDE, Amulya L, NARASIMHAN, Murali, HRUZEK, Dean C, MERRY, Nir, PANNESE, Patrick

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HIGH FLOW VELOCITY, GAS-PURGED, SIDE STORAGE POD APPARATUS, ASSEMBLIES, AND METHODS von Merry, Nir, Pannese, Patrick, Reuter, Paul B, Narasimhan, Murali, Athayde, Amulya L, Hruzek, Dean C

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Plasma-assisted CD shrink and overlay metrology techniques for double patterning von Sadjadi, R., Zhu, H., Cirigliano, P., Pavel, E., Athayde, A., Bozdog, C., Sendler, M., Mor, D.

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Etch Challenges for 3D NAND Flash Technology von Khan, Anisul Haque, Srinivasan, Sunil, Choi, Jinhan, Athayde, Amulya, Achutharaman, Raman

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Methods and apparatus for backside via reveal processing von Wylie, Mark McTaggart, Abdullah, Muhammad Adli Danish Bin, Mori, Glen T, Chidambaram, Ramesh, Sundarrajan, Arvind, Athayde, Amulya Ligorio, Lianto, Prayudi, Mehta, Gaurav, Vinluan, Ricardo Fujii, See, Guan Huei, Hung, Shih-Chao, Ummethala, Upendra V, Gan, Pin Gian, Chi, Sik Hin, Kew, Wei Hao, Kutney, Michael Charles

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METHODS AND APPARATUS FOR BACKSIDE VIA REVEAL PROCESSING von KEW, Wei Hao, CHI, Sik Hin, SEE, Guan Huei, MEHTA, Gaurav, ABDULLAH, Muhammad Adli Danish Bin, ATHAYDE, Amulya Ligorio, VINLUAN, Ricardo Fujii, LIANTO, Prayudi, WYLIE, Mark McTaggart, MORI, Glen T, KUTNEY, Michael Charles, HUNG, Shih-Chao, UMMETHALA, Upendra V, GAN, Pin Gian, SUNDARRAJAN, Arvind, CHIDAMBARAM, Ramesh

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METHODS AND APPARATUS FOR BACKSIDE VIA REVEAL PROCESSING von KEW, Wei Hao, CHI, Sik Hin, SEE, Guan Huei, MEHTA, Gaurav, ABDULLAH, Muhammad Adli Danish Bin, ATHAYDE, Amulya Ligorio, VINLUAN, Ricardo Fujii, LIANTO, Prayudi, WYLIE, Mark McTaggart, MORI, Glen T, KUTNEY, Michael Charles, HUNG, Shih-Chao, UMMETHALA, Upendra V, GAN, Pin Gian, SUNDARRAJAN, Arvind, CHIDAMBARAM, Ramesh

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High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods von ATHAYDE, AMULYA L, PANNESE, PATRICK, REUTER, PAUL B, NARASIMHAN, MURALI, MERRY, NIR, HRUZEK, DEAN C

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높은 유속, 가스-퍼지, 측면 저장 포드 장치, 어셈블리들, 및 방법들 von ATHAYDE AMULYA L, MERRY NIR, PANNESE PATRICK, NARASIMHAN MURALI, HRUZEK DEAN C, REUTER PAUL B

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HIGH FLOW VELOCITY, GAS-PURGED, SIDE STORAGE POD APPARATUS, ASSEMBLIES, AND METHODS von ATHAYDE AMULYA L, MERRY NIR, PANNESE PATRICK, NARASIMHAN MURALI, HRUZEK DEAN C, REUTER PAUL B

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High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods von ATHAYDE, AMULYA L, PANNESE, PATRICK, REUTER, PAUL B, NARASIMHAN, MURALI, MERRY, NIR, HRUZEK, DEAN C

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후면 비아 노출 프로세싱을 위한 방법들 및 장치 von MEHTA GAURAV, KEW WEI HAO, ATHAYDE AMULYA LIGORIO, MORI GLEN T, LIANTO PRAYUDI, UMMETHALA UPENDRA V, CHI SIK HIN, WYLIE MARK MCTAGGART, HUNG SHIH CHAO, ABDULLAH MUHAMMAD ADLI DANISH BIN, CHIDAMBARAM RAMESH, VINLUAN RICARDO FUJII, SUNDARRAJAN ARVIND, SEE GUAN HUEI, KUTNEY MICHAEL CHARLES, GAN PIN GIAN

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Methods and apparatus for backside via reveal processing von GAN, PIN GIAN, SEE, GUAN HUEI, ATHAYDE, AMULYA LIGORIO, MORI, GLEN T, WYLIE, MARK MCTAGGART, HUNG, SHIHAO, LIANTO, PRAYUDI, MEHTA, GAURAV, CHIDAMBARAM, RAMESH, VINLUAN, RICARDO FUJII, CHI, SIK HIN, KEW, WEI HAO, SUNDARRAJAN, ARVIND, ABDULLAH, MUHAMMAD ADLI DANISH BIN, KUTNEY, MICHAEL CHARLES, UMMETHALA, UPENDRA V

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The effect of fouling on the stability of membrane bioreactors von ATHAYDE, A. L, RAKESH GOVIND

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The combined flux technique for diffusion—reaction problems in partial equilibrium: Application to the facilitated transport of carbon dioxide in aqueous bicarbonate solutions von Gallagher, Paul M., Athayde, Amulya L., Ivory, Cornelius F.

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Electrical pumping in carrier-mediated membrane transport von Athayde, Amulya L., Ivory, Cornelius F.

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The effect of ac fields on carrier-mediated transport von Athayde, Amulya L., Ivory, Cornelius F.

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CONTROLLED RELEASE INFUSION DEVICE von FASTE, ROLF, A, ATHAYDE, AMULYA, L

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