Optimization of the polycrystalline silicon-on-silicon dioxide characterization using spectroscopic ellipsometry von Asinovsky, L.M.

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Characterization of the optical properties of PECVD SiNx films using ellipsometry and reflectometry von Asinovsky, L, Shen, F, Yamaguchi, T

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Control of PVD TiN thickness measurements von Asinovsky, Leo, Frisa, Larry E.

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Characterization of the optical properties of PECVD SiN sub(x) films using ellipsometry and reflectometry von Asinovsky, L, Shen, F, Yamaguchi, T

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Characterization of the optical properties of PECVD SiN x films using ellipsometry and reflectometry von Asinovsky, L, Shen, F, Yamaguchi, T

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Characterization of PVD TiN uniformity von Asinovsky, Leo, Frisa, Larry E.

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Characterization of Low Pressure Chemical Vapor Deposited Polysilicon Using Ellipsometry von Asinovsky, L., Schroth, M., Fox, S., Sweeney, J.J., Karagiannis, E.

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Characterization of PVD tin uniformity von ASINOVSKY, L, FRISA, L. E

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Spectroellipsometric characterization of thin silicon nitride films von Jiang, Zhong-Tao, Yamaguchi, Tomuo, Aoyama, Mitsuru, Nakanishi, Yoichiro, Asinovsky, Leo

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Characterization and metrology of the diffusion doped polysilicon using ellipsometry von Asinovsky, Leo, Schroth, Michael, Shen, Fei, Sweeney, John J.

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Characterization of the optical properties of PECVD SiNx films using ellipsometry and reflectometry von ASINOVSKY, L, SHEN, F, YAMAGUCHI, T

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The Application of Silicon Rich Nitride Films for Use as Deep-Ultraviolet Lithography Phase-Shifting Masks von Jiang, Zhong-Tao, Yamaguchi, Tomuo, Ohshimo, Kentaro, Aoyama, Mitsuru, Asinovsky, Leo

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Characterization and metrology of the diffusion doped polysilicon using ellipsometry von ASINOVSKY, L, SCHROTH, M, FEI SHEN, SWEENEY, J. J

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Spectroellipsometric characterization of thin silicon nitride films von JIANG, Z.-T, YAMAGUCHI, T, AOYAMA, M, NAKANISHI, Y, ASINOVSKY, L

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Oxidation characteristics of nitrogen monoxide by nanosecond pulse corona discharges in a methane combustion flue gas von Amirov, R H, Asinovsky, E I, Samoilov, I S, Shepelin, A V

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On the similarity of electric breakdown waves propagating in shielded discharge tubes von Asinovsky, E I, Lagarkov, A N, Markovets, V V, Rutkevich, I M

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Experimental investigation of transport properties of low-temperature plasma by means of electric arc von Asinovsky, E.I., Kirillin, A.V., Pakhomov, E.P., Shabashov, V.I.

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LIBRARY TOURS AS A MEANS OF DEVELOPMENT OF LOCAL HISTORY TOURISM von Lyapkova, Anna А.

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Gliding arc gas discharge von Fridman, Alexander, Nester, Sergei, Kennedy, Lawrence A., Saveliev, Alexei, Mutaf-Yardimci, Ozlem

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Quasi-DC electrical discharge characterization in a supersonic flow von Houpt, Alec, Hedlund, Brock, Leonov, Sergey, Ombrello, Timothy, Carter, Campbell

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