Experience with 3D integration technologies in the framework of the ATLAS pixel detector upgrade for the HL-LHC von Aruntinov, D., Barbero, M., Gonella, L., Hemperek, T., Hügging, F., Krüger, H., Wermes, N., Breugnon, P., Chantepie, B., Clemens, J.C., Fei, R., Fougeron, D., Godiot, S., Pangaud, P., Rozanov, A., Garcia-Sciveres, M., Mekkaoui, A.

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