Carbon-metal vibrating nanomembranes for high frequency microresonators von Thibert, Sébastien, Delaunay, Marc, Ghis, Anne

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Ultrathin Amorphous Carbon as Active Part of Vibrating MEMS von Anne Ghis, Sébastien Thibert, Marc Delaunay

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Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes von Ghis, Anne, Sridi, Nawres, Delaunay, Marc, Gabriel, Jean-Christophe P.

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Implementation and mechanical characterization of 2nm thin diamond like carbon suspended membranes von Ghis, Anne, Sridi, Nawres, Delaunay, Marc, Gabriel, Jean-Christophe P.

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Electrostatic method to estimate the mechanical properties of suspended membranes applied to nickel-coated graphene oxide von Sridi, Nawres, Lebental, Berengere, Azevedo, Joel, Gabriel, Jean Christophe P., Ghis, Anne

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Aligned carbon nanotube based ultrasonic microtransducers for durability monitoring in civil engineering von Lebental, B, Chainais, P, Chenevier, P, Chevalier, N, Delevoye, E, Fabbri, J-M, Nicoletti, S, Renaux, P, Ghis, A

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Mechanical Characterization of Ultrathin DLC Suspended Membranes for CMUT Applications von Thibert, Sébastien, Ghis, Anne, Delaunay, Marc

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DEVICE FOR PRODUCING AN AMORPHOUS CARBON LAYER BY ELECTRON CYCLOTRON RESONANCE PLASMA von GHIS, Anne, DELAUNAY, Marc

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MEMS HAVING AMORPHOUS CARBON MEMBRANE von GHIS, Anne, DELAUNAY, Marc

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DEVICE FOR PRODUCING AN AMORPHOUS CARBON LAYER BY ELECTRON CYCLOTRON RESONANCE PLASMA von GHIS, Anne, DELAUNAY, Marc

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DEVICE FOR PRODUCING AN AMORPHOUS CARBON LAYER BY ELECTRON CYCLOTRON RESONANCE PLASMA von GHIS, Anne, DELAUNAY, Marc

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Membrane of amorphous carbon and MEMS including such a membrane von Delaunay, Marc, Ghis, Anne

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MEMBRANE OF AMORPHOUS CARBON AND MEMS INCLUDING SUCH A MEMBRANE von DELAUNAY Marc, GHIS Anne

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8-GHz bandwidth spatial-sampling modules for ultra-fast random-signal analysis von Rolland, Nathalie, Benlarbi-Delaï, Aziz, Ghis, Anne, Rolland, Paul-Alain

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DISPOSITIF POUR LA FABRICATION D'UNE COUCHE EN CARBONE AMORPHE PAR PLASMA A LA RESONANCE CYCLOTRON ELECTRONIQUE von DELAUNAY, MARC, GHIS, ANNE

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STRUCTURE CONDUCTRICE D'ETENDUE VARIABLE EN FONCTION DE LA FREQUENCE von GHIS ANNE

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Angle of arrival measurement using an ultra fast transient analyzer and music algorithm von Benlarbi-Delaï, Aziz, Rolland, Nathalie, Ghis, Anne, Rolland, Paul-Alain

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Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante von GHIS, Anne, DELAUNAY, Marc

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ULTRASONIC TRANSDUCER WITH VIBRATING MEMBRANE WITH CAPACITIVE EFFECT AT HIGH BANDWIDTH von GHIS, Anne, DELAUNAY, Marc

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CMUT cell formed from a membrane of nanotubes or nanowires or nanorods and device for ultra high frequency acoustic imaging including multiple cells of this kind von GHIS ANNE, LEBENTAL BERENGERE

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