Formation of porous silicon on a non-conductive substrate and its use as a sacrificial layer von Andrushin, S Ya, Balagurov, L A, Liberova, G V, Loginov, B A, Petrova, E A, Sapelkin, A, Unal, B, Yarkin, D G

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Study of the porous polycrystalline silicon formation process von Andrushin, S Ya, Balagurov, L A, Bayliss, S C, Orlov, A F, Petrova, E A, Yarkin, D G

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Metal/PS/c-Si photodetectors based on unoxidized and oxidized porous silicon von Balagurov, L.A, Bayliss, S.C, Andrushin, S.Ya, Orlov, A.F, Unal, B, Yarkin, D.G, Petrova, E.A

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Low noise photosensitive device structures based on porous silicon von Balagurov, L.A, Bayliss, S.C, Yarkin, D.G, Andrushin, S.Ya, Kasatochkin, V.S, Orlov, A.F, Petrova, E.A

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Formation of porous silicon on a non-conductive substrate and its use as a sacrificial layer von ANDRUSHIN, S. Ya, BALAGUROV, L. A, LIBEROVA, G. V, LOGINOV, B. A, PETROVA, E. A, SAPELKIN, A, UNAL, B, YARKIN, D. G

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Study of the porous polycrystalline silicon formation process von ANDRUSHIN, S. Ya, BALAGUROV, L. A, BAYLISS, S. C, ORLOV, A. F, PETROVA, E. A, YARKIN, D. G

Volltext