Room temperature wafer bonding of silicon, oxidized silicon, and crystalline quartz von Bengtsson, Stefan, Amirfeiz, Petra

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Plasma assisted room temperature bonding for MST von Weinert, A., Amirfeiz, P., Bengtsson, S.

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Formation of silicon structures by plasma-activated wafer bonding von AMIRFEIZ, P, BENGTSSON, S, BERGH, M, ZANGHELLINI, E, BÖRJESSON, L

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Room temperature wafer bonding using oxygen plasma treatment in reactive ion etchers with and without inductively coupled plasma von SANZ-VELASCO, Anke, AMIRFEIZ, Petra, BENGTSSON, Stefan, COLINGE, Cindy

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Wafer bonding: A flexible way to manufacture SOI materials for high performance applications von BENGTSSON, Stefan, AMIRFEIZ, Petra, JOHANSSON, Mikael

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Hydrophobic low temperature wafer bonding; void formation in the oxide free interface von AMIRFEIZ, Petra, SANZ-VELASCO, Anke, BENGTSSON, Stefan

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