Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD von Sedov, Vadim, Martyanov, Artem, Altakhov, Alexandr, Popovich, Alexey, Shevchenko, Mikhail, Savin, Sergey, Zavedeev, Evgeny, Zanaveskin, Maxim, Sinogeykin, Andrey, Ralchenko, Victor, Konov, Vitaly

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