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  1. 1
    Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H2 and SiH4/CH4/H2 Plasmas

    Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H2 and SiH4/CH4/H2 Plasmas von Mahoney, Edward J. D, Lalji, Alim K. S. K, Allden, John W. R, Truscott, Benjamin S, Ashfold, Michael N. R, Mankelevich, Yuri A


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  2. 2
    Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H-2 and SiH4/CH4/H-2 Plasmas

    Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H-2 and SiH4/CH4/H-2 Plasmas von Mahoney, Edward J. D., Lalji, Alim K. S. K., Allden, John W. R., Truscott, Benjamin S., Ashfold, Michael N. R., Mankelevich, Yuri A.


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  3. 3
    Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH 4 /H 2 and SiH 4 /CH 4 /H 2 Plasmas

    Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH 4 /H 2 and SiH 4 /CH 4 /H 2 Plasmas von Mahoney, Edward J. D., Lalji, Alim K. S. K., Allden, John W. R., Truscott, Benjamin S., Ashfold, Michael N. R., Mankelevich, Yuri A.


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