Analysis of the influence of nitrogen phase and surface heat transfer coefficient on cryogenic machining performance von Pusavec, F., Lu, T., Courbon, C., Rech, J., Aljancic, U., Kopac, J., Jawahir, I.S.

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Characterization of sputter deposited Au/Ni/Al multilayers on Si substrates von Resnik, D., Vrtačnik, D., Aljančič, U., Možek, M., Zalar, A., Amon, S.

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Influence of mechanical stress on adhesion properties of DC magnetron sputtered Ti/NiV/Ag layers on n +Si substrate von Resnik, D., Vrtačnik, D., Aljančič, U., Možek, M., Penič, S., Amon, S.

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Influence of mechanical stress on adhesion properties of DC magnetron sputtered Ti/NiV/Ag layers on nSi substrate von Resnik, D, Vrtacnik, D, Aljancic, U, Mozek, M, Penic, S, Amon, S

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Investigation of interface properties of Ti/Ni/Ag thin films on Si substrate von Resnik, D., Kovač, J., Vrtačnik, D., Aljančič, U., Možek, M., Zalar, A., Amon, S.

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Mechanical stress in thin film microstructures on silicon substrate von Resnik, D., Aljančič, U., Vrtačnik, D., Možek, M., Amon, S.

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Experimental study of Ti/Pt thin film heater and temperature sensors on Si platform von Resnik, D., Vrtacnik, D., Aljancic, U., Mozek, M., Amon, S.

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Effective roughness reduction of {100} and {311} planes in anisotropic etching of {100} silicon in 5% TMAH von Resnik, Drago, Vrtacnik, D, Aljancic, U, Amon, S

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A strip-type microthrottle pump: modeling, design and fabrication von Pečar, Borut, Vrtačnik, Danilo, Resnik, Drago, Možek, Matej, Aljančič, Uroš, Dolžan, Tine, Amon, Slavko, Križaj, Dejan

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Characterization of integrated thin film Pt heater and temperature sensors on Si platform von Resnik, D., Vrtacnik, D., Aljancic, U., Mozek, M., Pecar, B., Penic, S., Amon, S.

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The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon von Resnik, Drago, Vrtacnik, Danilo, Aljancic, Uros, Mozek, Matej, Amon, Slavko

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Effect of gamma irradiation on characteristics of FOXFET biased edge-on silicon strip detector von Vrtacnik, D., Resnik, D., Aljancic, U., Mozek, M., Amon, S.

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Wet etching of silicon structures bounded by (311) sidewalls von Resnik, D, Vrtacnik, D, Aljancic, U, Amon, S

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Side-illuminated 100 μm pitch X-ray detector for digital radiology von Vrtacnik, D, Krizaj, D, Mali, T, Resnik, D, Aljancic, U, Amon, S

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Microfluidic platforms realized by micromachining and anodic bonding of Si and glass substrates von Resnik, D., Aljancic, U., Vrtacnik, D., Mozek, M., Pecar, B., Amon, S.

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Study of low-temperature direct bonding of (111) and (100) silicon wafers under various ambient and surface conditions von Resnik, Drago, Vrtačnik, Danilo, Aljančič, Uroš, Amon, Slavko

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Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon von Resnik, D., Vrtacnik, D., Aljancic, U., Mozek, M., Amon, S.

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Microflow-generator for fuel-cell methanol hydrogen microreactor von Pečar, B, Možek, M, Resnik, D, Vrtačnik, D, Aljančič, U, Penicč, S, Amon, S

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Effective roughness reduction of  100  and  311  planes in anisotropic etching of  100  silicon in 5  TMAH von Resnik, Drago, Vrtacnik, D, Aljancic, U, Amon, S

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Temperature effects modeling in silicon piezoresistive pressure sensor von Aljancic, U., Resnik, D., Vrtacnik, D., Mozek, M., Amon, S.

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