METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTORS WITH SELF-ALIGNING GATE von Inkin V.N, Akhin'ko I.A, Il'ichev Eh.A

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METHOD FOR MANUFACTURING SELF-ALIGNED GATE FIELD-EFFECT TRANSISTORS von Sheljukhin E.Ju, Artamonov M.M, Grigor'ev A.T, Inkin V.N, Gol'dberg E.Ja, Il'ichev Eh.A, Akhin'ko I.A, Lipshits T.L

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METHOD FOR PRODUCING SHOTTKY-BARRIER FIELD-EFFECT TRANSISTORS FOR SUPERLARGE-SCALE ARSENIDE GALLIUM INTEGRATED CIRCUITS OF STORAGE DEVICES von Kravchenko L.N, Zybin S.N, Inkin B.N, Sheljukhin E.Ju, Artamonov M.M, Poltoratskij Eh.A, Rodionov A.V, Gol'dberg E.Ja, Il'ichev Eh.A, Akhin'ko I.A, Lipshits T.L, Emel'janov A.V

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