Tailoring the room temperature ferroelectric/paraelectric state in polycrystalline (Ba0.70Sr0.30)TiO3 thin films for silicon compatible integration von Zhu, Xiaohong, Le Rhun, Gwenaël, Dkhil, Brahim, Ren, Yinjuan, Zhu, Jiliang, Aïd, Marc, Defaÿ, Emmanuel

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Planarization of photoresist sacrificial layer for MEMS fabrication von Soulimane, Sofiane, Casset, Fabrice, Charvet, Pierre-Louis, Maeder, Catherine, Aïd, Marc

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Switchable and tunable strontium titanate electrostrictive bulk acoustic wave resonator integrated with a Bragg mirror von Volatier, Alexandre, Defaÿ, Emmanuel, Aïd, Marc, N'hari, Amy, Ancey, Pascal, Dubus, Bertrand

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Preferential growth and enhanced dielectric properties of Ba0.7Sr0.3TiO3 thin films with preannealed Pt bottom electrode von Zhu, Xiaohong, Defaÿ, Emmanuel, Aïd, Marc, Ren, Yinjuan, Zhang, Caiyun, Zhu, Jiliang, Zhu, Jianguo, Xiao, Dingquan

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High permittivity 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 relaxor thin films for high-value, wide-temperature capacitor applications von Zhu, Xiaohong, Defaÿ, Emmanuel, Le Rhun, Gwenaël, Aïd, Marc, Xu, Yunhui, Zhang, Qiang, Xiao, Yunjun, Gao, Haobin, Liang, Dayun, Zhu, Jiliang, Zhu, Jianguo, Xiao, Dingquan

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SrTiO3/BaTiO3 multilayers thin films for integrated tunable capacitors applications von GUIGUES, Benoit, GUILLAN, Julie, DEFAY, Emmanuel, GARREC, Pierre, WOLOZAN, David, ANDRE, Bernard, LAUGIER, Frederic, PANTEL, Roland, GAGNARD, Xavier, AÏD, Marc

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Above IC integrated SrTiO3 high K MIM capacitors von Defay, E., Wolozan, D., Garrec, P., Andre, B., Ulmer, L., Aid, M., Blanc, J.-P., Serret, E., Delpech, P., Giraudin, J.-C., Guillan, J., Pellissier, D., Ancey, P.

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High pass filter with above IC integrated SrTiO3 high K MIM capacitors von DELAY, Emmanuel, WOLOZAN, David, ULMER, Laurent, AÏD, Marc, ANCEY, Pascal, BLANC, Jean-Pierre, SERRET, Emmanuelle, GARREC, Pierre, VERRUN, Sophie, PELLISSIER, Denis, DELPECH, Philippe, GUILLAN, Julie, ANDRE, Bernard

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Acoustic technologies for advanced RF architectures von Reinhardt, Alexandre, Parat, Guy, Defay, Emmanuel, Aid, Marc, Domingue, Frederic

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Tailoring the room temperature ferroelectric/paraelectric state in polycrystalline (Ba 0.70 Sr 0.30)TiO 3 thin films for silicon compatible integration von Zhu, Xiaohong, Le Rhun, Gwenaël, Dkhil, Brahim, Ren, Yinjuan, Zhu, Jiliang, Aïd, Marc, Defaÿ, Emmanuel

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Preferential growth and enhanced dielectric properties of Ba 0.7 Sr 0.3 TiO 3 thin films with preannealed Pt bottom electrode von Zhu, Xiaohong, Defaÿ, Emmanuel, Aïd, Marc, Ren, Yinjuan, Zhang, Caiyun, Zhu, Jiliang, Zhu, Jianguo, Xiao, Dingquan

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Verfahren zum Erhalten einer AlN-Schicht mit deutlich vertikalen Flanken von Aid, Marc, Defay, Emmanuel, Lefevre, Aude, Parat, Guy-Michel

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SrTiO 3/BaTiO 3 multilayers thin films for integrated tunable capacitors applications von Guigues, Benoit, Guillan, Julie, Defaÿ, Emmanuel, Garrec, Pierre, Wolozan, David, André, Bernard, Laugier, Frédéric, Pantel, Roland, Gagnard, Xavier, Aïd, Marc

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Device and method for detecting elements in a fluid environment von SARRUT-RIO NICOLAS, DEFAY EMMANUEL, AID MARC, LASSAGNE PIERRE-PATRICK

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Electrode sizing for guided wave resonator above a Bragg mirror von Kone, I., Reinhardt, A., Domingue, F., Dubus, B., Buchaillot, L., Casset, F., Carpentier, J.F., Aid, M.

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Finite element simulation of digital recording on ME tape and comparison with experimental data von Werling, A., Ossart, F., Albertini, J.-B., Ald, M.

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Apparatus and method for detecting elements in a fluid medium by lamb waves von AID, MARC, SARRUT-RIO, NICOLAS, DEFAY, EMMANUEL, LASSAGNE, PIERRE-PATRICK

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Resonator using Guided waves in a piezoelectric layer above a Bragg mirror von Kone, I., Dubus, B., Buchaillot, L., Reinhardt, A., Casset, F., Aid, M., Carpentier, J.F., Ancey, P.

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Method for obtaining a layer of AlN having substantially vertical sides von LEFEVRE AUDE, AID MARC, DEFAY EMMANUEL, PARAT GUY-MICHEL

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Verfahren zum Erhalten einer Luftschicht mit deutlich vertikalen Flanken von AID, MARC, LEFEVRE, AUDE, DEFAY, EMMANUEL, PARAT, GUY-MICHEL

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