Special wafer guide device for semiconductor wafer acid etching machine von ZHANG MUXIANG, CAO QIANG, AZUMA SHIHIRO, TAN YONGLIN

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Silicon wafer cleaning device and cleaning machine von ZHANG MUXIANG, YANG FEILONG, XU XIAOZHAN, AZUMA SHIHIRO, LIU JIANWEI

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Liquid medicine cooling equipment and concentration detection system for semiconductor production von ZHANG MUXIANG, SUN CHENGUANG, WANG YANJUN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN

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Novel basket pouring device von YAN XIAOTONG, YANG LUXIAO, SUN CHENGUANG, WANG YANJUN, AZUMA SHIHIRO, TAN YONGLIN

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Grinding disc cleaning process von BAI YULIN, SUN XIKAI, SUN CHENGUANG, WANG YANJUN, DUAN LIQUN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN

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Temperature sensor protection device and cleaning machine von ZHANG MUXIANG, YANG FEILONG, WANG KUN, XU XIAOZHAN, XU HUAXIANG, LIU SONGSONG, AZUMA SHIHIRO

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Safety door lifting device von ZHANG MUXIANG, SUN CHENGUANG, WANG KUN, WANG YANJUN, XU XIAOZHAN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN

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Resistivity multi-point automatic measuring and sorting equipment and method von LIU LIMING, WANG HONGYE, SONG CHANGXU, LI WENLEI, DONG XU, TIAN HAO, WANG CHONGSHAN, LIU PENGCHENG, ZHANG BIBO, ZHANG JIUWU, WANG LINGYUN, AZUMA SHIHIRO

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Automatic heating spin dryer von SUN XIKAI, SUN CHENGUANG, WANG YANJUN, YAN ZHENGXIAN, HAN MUDI, SONG CHUNMING, DUAN LIQUN, AZUMA SHIHIRO, TAN YONGLIN

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Adsorption device and film pasting jig von WU JIANXIN, ZHANG BOLIANG, SUN CHENGUANG, LI XIN, WANG YANJUN, PAN LE, LU JIAN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN

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Mistake proofing device for roller of semiconductor acid corrosion machine von YANG HAIBING, ZHANG MUXIANG, LI WENLEI, SUN CHENGUANG, WANG KUN, WANG YANJUN, XU XIAOZHAN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN

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Sucking disc structure for preventing silicon wafer from being scratched and film pasting method of sucking disc structure von WU JIANXIN, ZHANG BOLIANG, SUN CHENGUANG, LI XIN, WANG YANJUN, PAN LE, LU JIAN, AZUMA SHIHIRO, LIU JIANWEI, TAN YONGLIN

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Device for detecting foreign matters on surface of ceramic plate and preventing foreign matters from flowing into cleaning machine von ZHAO PENG, XU PUZENG, WANG YANJUN, YAN ZHENGXIAN, LIU JIANWEI, TAN YONGLIN, WANG LIZHENG, ZHENG DONGYU, LIU ZISHEN, LI WENLEI, SUN CHENGUANG, CHEN HAIBO, ZHOU LINZHUANG, AZUMA SHIHIRO

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DUPLEX STAINLESS STEEL EXCELLENT IN CORROSION RESISTANCE von OGAWA, SHIHIRO, AZUMA, SHIGEKI

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